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Patent applications and USPTO patent grants for Kittner; Horst.The latest application filed is for "apparatus for detecting a pre-aligning element at a wafer".
Patent | Date |
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Apparatus for detecting a pre-aligning element at a wafer Grant 10,401,159 - Zell , et al. Sep | 2019-09-03 |
Apparatus for Detecting a Pre-Aligning Element at a Wafer App 20170010092 - Zell; Thomas ;   et al. | 2017-01-12 |
Apparatus for detecting a pre-aligning element at a wafer Grant 9,476,701 - Zell , et al. October 25, 2 | 2016-10-25 |
Apparatus and method for aligning a wafer's backside to a wafer's frontside Grant 8,947,664 - Campidell , et al. February 3, 2 | 2015-02-03 |
Apparatus for Detecting a Pre-Aligning Element at a Wafer App 20150009498 - Zell; Thomas ;   et al. | 2015-01-08 |
Apparatus and Method for Aligning a Wafer's Backside to a Wafer's Frontside App 20110149062 - Campidell; Josef ;   et al. | 2011-06-23 |
System and method including a prealigner Grant 7,723,710 - Campidell , et al. May 25, 2 | 2010-05-25 |
System And Method Including A Prealigner App 20090189054 - Campidell; Josef ;   et al. | 2009-07-30 |
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