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Patent applications and USPTO patent grants for KITAZOE; Makiko.The latest application filed is for "self-cleaning catalytic chemical vapor deposition apparatus and cleaning method thereof".
Patent | Date |
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Self-cleaning Catalytic Chemical Vapor Deposition Apparatus And Cleaning Method Thereof App 20120145184 - KITAZOE; Makiko ;   et al. | 2012-06-14 |
Method of forming silicon nitride film and method of manufacturing semiconductor device Grant 7,510,984 - Saito , et al. March 31, 2 | 2009-03-31 |
Unit-Layer Post-Processing Catalyst Chemical-Vapor-Deposition Apparatus and Its Film Forming Method App 20080050523 - Kitazoe; Makiko ;   et al. | 2008-02-28 |
Self-Cleaning Catalytic Chemical Vapor Deposition Apparatus And Cleaning Method Thereof App 20070209677 - Kitazoe; Makiko ;   et al. | 2007-09-13 |
Method of forming silicon nitride film and method of manufacturing semiconductor device App 20050196977 - Saito, Tsuyoshi ;   et al. | 2005-09-08 |
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