Patent | Date |
---|
Method for fabricating Mach-Zehnder modulator, Mach-Zehnder modulator Grant 10,901,290 - Kitamura January 26, 2 | 2021-01-26 |
Light receiving device, method for fabricating light receiving device Grant 10,823,610 - Kitamura , et al. November 3, 2 | 2020-11-03 |
Method For Fabricating Mach-zehnder Modulator, Mach-zehnder Modulator App 20200012164 - KITAMURA; Takamitsu | 2020-01-09 |
Method for fabricating Mach-Zehnder modulator, Mach-Zehnder modulator Grant 10,475,669 - Kitamura Nov | 2019-11-12 |
Semiconductor optical element and method for manufacturing the same Grant 10,248,000 - Kitamura , et al. | 2019-04-02 |
Mach-Zehnder modulator, method for fabricating Mach-Zehnder modulator Grant 10,185,204 - Goto , et al. Ja | 2019-01-22 |
Light Receiving Device, Method For Fabricating Light Receiving Device App 20190003884 - KITAMURA; Takamitsu ;   et al. | 2019-01-03 |
Semiconductor Optical Element And Method For Manufacturing The Same App 20180275482 - KITAMURA; Takamitsu ;   et al. | 2018-09-27 |
Method For Fabricating Mach-zehnder Modulator, Mach-zehnder Modulator App 20180226270 - KITAMURA; Takamitsu | 2018-08-09 |
Mach-zehnder Modulator, Method For Fabricating Mach-zehnder Modulator App 20170285438 - GOTO; Hiroaki ;   et al. | 2017-10-05 |
Mach-Zehnder modulator, method of making optical waveguide structure Grant 9,753,350 - Kitamura , et al. September 5, 2 | 2017-09-05 |
Modulator and production method thereof Grant 9,638,980 - Yagi , et al. May 2, 2 | 2017-05-02 |
Optical semiconductor device and method of producing the same Grant 9,563,100 - Masuyama , et al. February 7, 2 | 2017-02-07 |
Electrostatic chuck and method of manufacturing semiconductor device Grant 9,543,182 - Furuya , et al. January 10, 2 | 2017-01-10 |
Semiconductor optical modulator and method for manufacturing semiconductor optical modulator Grant 9,523,871 - Kitamura , et al. December 20, 2 | 2016-12-20 |
Mach-zehnder Modulator, Method Of Making Optical Waveguide Structure App 20160282701 - KITAMURA; Takamitsu ;   et al. | 2016-09-29 |
Method for producing optical semiconductor device Grant 9,329,451 - Kitamura , et al. May 3, 2 | 2016-05-03 |
Method for producing semiconductor optical device and semiconductor optical device Grant 9,280,030 - Kimura , et al. March 8, 2 | 2016-03-08 |
Method for manufacturing semiconductor modulator and semiconductor modulator Grant 9,280,004 - Yagi , et al. March 8, 2 | 2016-03-08 |
Method for manufacturing semiconductor optical waveguide device, and semiconductor optical waveguide device Grant 9,261,649 - Kitamura , et al. February 16, 2 | 2016-02-16 |
Modulator And Production Method Thereof App 20160026063 - YAGI; Hideki ;   et al. | 2016-01-28 |
Optical Semiconductor Device And Method Of Producing The Same App 20160026064 - MASUYAMA; Ryuji ;   et al. | 2016-01-28 |
Semiconductor Optical Modulator And Method For Manufacturing Semiconductor Optical Modulator App 20160011439 - KITAMURA; Takamitsu ;   et al. | 2016-01-14 |
Semiconductor optical waveguide device and method for manufacturing the same Grant 9,229,168 - Furuya , et al. January 5, 2 | 2016-01-05 |
Semiconductor optical device and method for manufacturing semiconductor optical device Grant 9,229,293 - Kono , et al. January 5, 2 | 2016-01-05 |
Method for producing spot-size convertor Grant 9,176,360 - Yagi , et al. November 3, 2 | 2015-11-03 |
Method for manufacturing mach-zehnder modulator, method for manufacturing optical waveguide, and optical waveguide Grant 9,158,139 - Kitamura , et al. October 13, 2 | 2015-10-13 |
Method For Manufacturing Semiconductor Optical Waveguide Device, And Semiconductor Optical Waveguide Device App 20150260915 - KITAMURA; Takamitsu ;   et al. | 2015-09-17 |
Method For Producing Optical Semiconductor Device App 20150132877 - KITAMURA; Takamitsu ;   et al. | 2015-05-14 |
Method for producing optical semiconductor device Grant 8,986,560 - Kitamura , et al. March 24, 2 | 2015-03-24 |
Method for fabricating semiconductor device Grant 8,987,015 - Yui , et al. March 24, 2 | 2015-03-24 |
Method for manufacturing optical semiconductor device Grant 8,986,553 - Kitamura , et al. March 24, 2 | 2015-03-24 |
Semiconductor Optical Device And Method For Manufacturing Semiconductor Optical Device App 20150043867 - KONO; Naoya ;   et al. | 2015-02-12 |
Method For Producing Semiconductor Optical Device And Semiconductor Optical Device App 20150023627 - KIMURA; Daisuke ;   et al. | 2015-01-22 |
Method For Producing Spot-size Convertor App 20150024527 - YAGI; Hideki ;   et al. | 2015-01-22 |
Method For Manufacturing Semiconductor Modulator And Semiconductor Modulator App 20140294335 - YAGI; Hideki ;   et al. | 2014-10-02 |
Method For Manufacturing Mach-zehnder Modulator, Method For Manufacturing Optical Waveguide, And Optical Waveguide App 20140291717 - KITAMURA; Takamitsu ;   et al. | 2014-10-02 |
Semiconductor Optical Waveguide Device And Method For Manufacturing The Same App 20140254998 - FURUYA; Akira ;   et al. | 2014-09-11 |
Semiconductor device Grant 8,754,419 - Nakata , et al. June 17, 2 | 2014-06-17 |
Method For Producing Optical Semiconductor Device App 20140116983 - KITAMURA; Takamitsu ;   et al. | 2014-05-01 |
Method For Manufacturing Optical Semiconductor Device App 20140021160 - KITAMURA; Takamitsu ;   et al. | 2014-01-23 |
Semiconductor substrate and semiconductor device Grant 8,546,813 - Makabe , et al. October 1, 2 | 2013-10-01 |
Method for fabricating semiconductor device Grant 8,283,240 - Yui , et al. October 9, 2 | 2012-10-09 |
Electrostatic Chuck And Method Of Manufacturing Semiconductor Device App 20120134065 - Furuya; Akira ;   et al. | 2012-05-31 |
Semiconductor Substrate And Semiconductor Device App 20120001195 - Makabe; Isao ;   et al. | 2012-01-05 |
Semiconductor Device App 20120001194 - Nakata; Ken ;   et al. | 2012-01-05 |
Method For Fabricating Semiconductor Device App 20120003821 - Yui; Keiichi ;   et al. | 2012-01-05 |
Method For Fabricating Semiconductor Device App 20120003820 - Yui; Keiichi ;   et al. | 2012-01-05 |