Kitamura; Shinzi
Patent Applications and Registrations
Patent applications and USPTO patent grants for Kitamura; Shinzi.The latest application filed is for "method of forming coating film and apparatus therefor".
- Kitamura; Shinzi - Kumamoto-ken JP
- Kitamura; Shinzi - Tosu JP
- Kitamura; Shinzi - Kumamoto JP
| Patent | Date |
|---|---|
| Method of forming coating film and apparatus therefor Grant 6,063,190 - Hasebe , et al. May 16, 2 | 2000-05-16 |
| Solvent and resist spin coating apparatus Grant 5,942,035 - Hasebe , et al. August 24, 1 | 1999-08-24 |
| Method of forming coating film and apparatus therefor Grant 5,658,615 - Hasebe , et al. August 19, 1 | 1997-08-19 |
| Resist processing apparatus, substrate processing apparatus and method of transferring a processed article Grant 5,626,675 - Sakamoto , et al. May 6, 1 | 1997-05-06 |
| Method for scrubbing and cleaning substrate Grant 5,518,552 - Tanoue , et al. May 21, 1 | 1996-05-21 |
| Device and method for scrubbing and cleaning substrate Grant 5,345,639 - Tanoue , et al. September 13, 1 | 1994-09-13 |
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