Patent | Date |
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Etching method and etching apparatus Grant 10,672,622 - Shimizu , et al. | 2020-06-02 |
Etching Method And Etching Apparatus App 20190067031 - SHIMIZU; Yusuke ;   et al. | 2019-02-28 |
Method for etching silicon layer and plasma processing apparatus Grant 10,121,674 - Kitamura , et al. November 6, 2 | 2018-11-06 |
Method For Etching Silicon Layer And Plasma Processing Apparatus App 20170323796 - KITAMURA; Akinori ;   et al. | 2017-11-09 |
Method for etching silicon layer and plasma processing apparatus Grant 9,779,954 - Kitamura , et al. October 3, 2 | 2017-10-03 |
Method of etching organic film Grant 9,711,371 - Kitamura , et al. July 18, 2 | 2017-07-18 |
Plasma etching method Grant 9,570,312 - Takeda , et al. February 14, 2 | 2017-02-14 |
Method of selectively removing a region formed of silicon oxide and plasma processing apparatus Grant 9,502,537 - Kitamura , et al. November 22, 2 | 2016-11-22 |
Plasma etching method Grant 9,412,607 - Kamada , et al. August 9, 2 | 2016-08-09 |
Method Of Etching Organic Film App 20160126071 - Kitamura; Akinori ;   et al. | 2016-05-05 |
Golf ball resin composition and golf ball Grant 9,289,651 - Kitamura , et al. March 22, 2 | 2016-03-22 |
Plasma etching method and plasma etching apparatus Grant 9,209,034 - Kitamura , et al. December 8, 2 | 2015-12-08 |
Method for producing polysiloxane Grant 9,181,399 - Ogura , et al. November 10, 2 | 2015-11-10 |
Composition for organic semiconductor insulating films, and organic semiconductor insulating film Grant 9,136,486 - Suzuki , et al. September 15, 2 | 2015-09-15 |
Etching method Grant 9,087,798 - Ohtake , et al. July 21, 2 | 2015-07-21 |
Method For Etching Silicon Layer And Plasma Processing Apparatus App 20150162203 - KITAMURA; Akinori ;   et al. | 2015-06-11 |
Plasma Etching Method App 20150099366 - Takeda; Ryohei ;   et al. | 2015-04-09 |
Method Of Selectively Removing A Region Formed Of Silicon Oxide And Plasma Processing Apparatus App 20150064922 - KITAMURA; Akinori ;   et al. | 2015-03-05 |
Etching Method App 20150044877 - Ohtake; Hiroto ;   et al. | 2015-02-12 |
Process for producing solvent-soluble reactive polysiloxanes Grant 8,952,117 - Kitamura , et al. February 10, 2 | 2015-02-10 |
Method for manufacturing reactive polysiloxane solution Grant 8,940,852 - Furuta , et al. January 27, 2 | 2015-01-27 |
Plasma Etching Method And Plasma Etching Apparatus App 20150024603 - Kitamura; Akinori ;   et al. | 2015-01-22 |
Plasma Etching Method App 20140332372 - Kamada; Tomiko ;   et al. | 2014-11-13 |
Composition For Organic Semiconductor Insulating Films, And Organic Semiconductor Insulating Film App 20140326980 - Suzuki; Hiroshi ;   et al. | 2014-11-06 |
Thermal-shock-resistant Cured Product And Method For Producing Same App 20140323677 - Kitamura; Akinori ;   et al. | 2014-10-30 |
Method For Producing Polysiloxane App 20140303392 - Ogura; Kinuko ;   et al. | 2014-10-09 |
Curable composition and process for production of organosilicon compound Grant 8,829,142 - Ooike , et al. September 9, 2 | 2014-09-09 |
Bevel/backside polymer removing method and device, substrate processing apparatus and storage medium Grant 8,821,644 - Sakuragi , et al. September 2, 2 | 2014-09-02 |
Golf Ball Resin Composition And Golf Ball App 20140031145 - KITAMURA; Akinori ;   et al. | 2014-01-30 |
Process For Producing Solvent-soluble Reactive Polysiloxanes App 20130338282 - Kitamura; Akinori ;   et al. | 2013-12-19 |
Curable Composition And Process For Production Of Organosilicon Compound App 20130149455 - Ooike; Sayaka ;   et al. | 2013-06-13 |
Organosilicon compounds which have oxetanyl groups, and a method for the production and curable compositions of the same Grant 8,329,774 - Ooike , et al. December 11, 2 | 2012-12-11 |
Polysiloxane, method for producing the same, and method for producing cured product of the same Grant 8,168,739 - Kitamura , et al. May 1, 2 | 2012-05-01 |
Process for producing silicon compound having oxetanyl group Grant 8,110,613 - Oike , et al. February 7, 2 | 2012-02-07 |
Process For Producing Silicon Compound Having Oxetanyl Group App 20110245448 - Oike; Sayaka ;   et al. | 2011-10-06 |
Curable Composition And Process For Production Of Organosilicon Compound App 20110071255 - Ooike; Sayaka ;   et al. | 2011-03-24 |
Organosilicon Compounds Which Have Oxetanyl Groups, And A Method For The Production And Curable Compositions Of The Same App 20110054063 - Ooike; Sayaka ;   et al. | 2011-03-03 |
Plasma etching method, plasma etching apparatus, control program and computer-readable storage medium Grant 7,883,631 - Kitamura , et al. February 8, 2 | 2011-02-08 |
Plasma etching method Grant 7,842,190 - Kitamura November 30, 2 | 2010-11-30 |
Polycarbosilane and method for producing same Grant 7,838,626 - Shimano , et al. November 23, 2 | 2010-11-23 |
Polysiloxane, Method For Producing The Same, And Method For Producing Cured Product Of The Same App 20100280210 - Kitamura; Akinori ;   et al. | 2010-11-04 |
Etching gas, etching method and etching gas evaluation method Grant 7,794,616 - Honda , et al. September 14, 2 | 2010-09-14 |
Semiconductor device manufacturing method, semiconductor device manufacturing apparatus, control program and computer storage medium Grant 7,655,572 - Kitamura , et al. February 2, 2 | 2010-02-02 |
Method Of Checking Substrate Edge Processing Apparatus App 20090188892 - Yamazaki; Kumiko ;   et al. | 2009-07-30 |
Polycarbosilane And Method For Producing Same App 20090163690 - Shimano; Toshihisa ;   et al. | 2009-06-25 |
Bevel/backside Polymer Removing Method And Device, Substrate Processing Apparatus And Storage Medium App 20090143894 - SAKURAGI; Isamu ;   et al. | 2009-06-04 |
Plasma processing method Grant 7,473,377 - Yamaguchi , et al. January 6, 2 | 2009-01-06 |
Plasma etching method Grant 7,300,881 - Kato , et al. November 27, 2 | 2007-11-27 |
Plasma Etching Method App 20070228006 - Kitamura; Akinori | 2007-10-04 |
Plasma Etching Method, Plasma Etching Apparatus, Control Program And Computer-readable Storage Medium App 20070212887 - Kitamura; Akinori ;   et al. | 2007-09-13 |
Plasma Etching Method, Plasma Etching Apparatus, Control Program And Computer-readable Storage Medium App 20070197040 - Kitamura; Akinori ;   et al. | 2007-08-23 |
Semiconductor Device Manufacturing Method, Semiconductor Device Manufacturing Apparatus, Control Program And Computer Storage Medium App 20070090093 - Kitamura; Akinori ;   et al. | 2007-04-26 |
Method of plasma processing Grant 7,183,219 - Hama , et al. February 27, 2 | 2007-02-27 |
Etching gas, etching method and etching gas evaluation method App 20060027530 - Honda; Masanobu ;   et al. | 2006-02-09 |
Dry developing method Grant 6,986,851 - Kitamura , et al. January 17, 2 | 2006-01-17 |
Plasma processing method App 20050103748 - Yamaguchi, Tomoyo ;   et al. | 2005-05-19 |
Method of plasma etching App 20050101140 - Yamaguchi, Tomoyo ;   et al. | 2005-05-12 |
Plasma etching method App 20050101137 - Kato, Kazuya ;   et al. | 2005-05-12 |
Dry developing method App 20040169009 - Kitamura, Akinori ;   et al. | 2004-09-02 |
Flowmeter, flow detecting switch, control method of flowmeter, control method of flow detecting switch, and recording medium having recorded a control program Grant 6,611,785 - Yamanaka , et al. August 26, 2 | 2003-08-26 |
Nucleotide compound, nucleotide block oligonucleotide, and method for producing them Grant 6,380,378 - Kitamura , et al. April 30, 2 | 2002-04-30 |