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High pressure processing method Grant 7,252,719 - Sakashita , et al. August 7, 2 | 2007-08-07 |
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High pressure processing apparatus Grant 6,874,513 - Yamagata , et al. April 5, 2 | 2005-04-05 |
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High pressure processing apparatus and high pressure processing method Grant 6,823,880 - Sakashita , et al. November 30, 2 | 2004-11-30 |
High pressure processing apparatus and method App 20040231698 - Mizobata, Ikuo ;   et al. | 2004-11-25 |
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Method and system for processing substrate Grant 6,703,316 - Inoue , et al. March 9, 2 | 2004-03-09 |
High-pressure drying apparatus, high-pressure drying method and substrate processing apparatus Grant 6,691,430 - Saito , et al. February 17, 2 | 2004-02-17 |
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High-pressure processing apparatus App 20020148492 - Yamagata, Masahiro ;   et al. | 2002-10-17 |
Apparatus for processing a substrate providing an efficient arrangement and atmospheric isolation of chemical treatment section Grant 6,099,643 - Ohtani , et al. August 8, 2 | 2000-08-08 |
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