Kitagawa; Dai

Patent Applications and Registrations

Patent applications and USPTO patent grants for Kitagawa; Dai.The latest application filed is for "heater power feeding mechanism".

Company Profile

3.8.14

Kitagawa; Dai - Miyagi JP
KITAGAWA; Dai - Kurokawa-gun JP
Kitagawa; Dai - Osaka JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Placing table and plasma treatment apparatus Grant 11,373,884 - Kitagawa , et al. June 28, 2	2022-06-28
Heater Power Feeding Mechanism App 20210366741 - KITAGAWA; Dai ; et al.	2021-11-25
Power feeding mechanism and method for controlling temperature of a stage Grant 11,121,009 - Kitagawa September 14, 2	2021-09-14
Substrate Support And Plasma Processing Apparatus App 20210098224 - KITAGAWA; Dai	2021-04-01
Placing Table And Plasma Processing Apparatus App 20210051772 - KITAGAWA; Dai	2021-02-18
Placing Table And Plasma Treatment Apparatus App 20200266081 - KITAGAWA; Dai ; et al.	2020-08-20
Placing table and plasma treatment apparatus Grant 10,679,869 - Kitagawa , et al.	2020-06-09
Electrostatic chuck, placing table and plasma processing apparatus Grant 10,593,522 - Koizumi , et al.	2020-03-17
Mounting table and substrate processing apparatus Grant 10,512,125 - Kitagawa Dec	2019-12-17
Feeder-cover structure and semiconductor production apparatus Grant 10,374,358 - Sakane , et al.	2019-08-06
Temperature control mechanism, temperature control method and substrate processing apparatus Grant 10,199,246 - Koizumi , et al. Fe	2019-02-05
Placing Unit And Plasma Processing Apparatus App 20180144945 - TAKAHASHI; Tomoyuki ; et al.	2018-05-24
Power Feeding Mechanism And Method For Controlling Temperature Of A Stage App 20170140957 - KITAGAWA; Dai	2017-05-18
Heater Power Feeding Mechanism App 20170140958 - KITAGAWA; Dai ; et al.	2017-05-18
Placing Table And Plasma Treatment Apparatus App 20170140954 - KITAGAWA; Dai ; et al.	2017-05-18
Temperature Control Mechanism, Temperature Control Method And Substrate Processing Apparatus App 20160225645 - KOIZUMI; Katsuyuki ; et al.	2016-08-04
Mounting Table And Substrate Processing Apparatus App 20160198528 - KITAGAWA; Dai	2016-07-07
Placing Table And Plasma Processing Apparatus App 20150373783 - KITAGAWA; Dai	2015-12-24
Semiconductor manufacturing method and semiconductor manufacturing apparatus Grant 9,209,043 - Kitagawa , et al. December 8, 2	2015-12-08
Semiconductor Manufacturing Method And Semiconductor Manufacturing Apparatus App 20150325455 - KITAGAWA; DAI ; et al.	2015-11-12
Electrostatic Chuck, Placing Table And Plasma Processing Apparatus App 20150311106 - KOIZUMI; Katsuyuki ; et al.	2015-10-29
Feeder-cover Structure And Semiconductor Production Apparatus App 20150214653 - SAKANE; Ryota ; et al.	2015-07-30

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