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Patent applications and USPTO patent grants for Kitabayashi; Tetsuo.The latest application filed is for "ceramic member".
Patent | Date |
---|---|
Ceramic member Grant 11,043,401 - Umeki , et al. June 22, 2 | 2021-06-22 |
Holding apparatus Grant 10,840,117 - Kitabayashi , et al. November 17, 2 | 2020-11-17 |
Ceramic heater Grant 10,679,873 - Kitabayashi , et al. | 2020-06-09 |
Holding device Grant 10,453,712 - Tsuchida , et al. Oc | 2019-10-22 |
Ceramic Member App 20180308722 - UMEKI; Toshiya ;   et al. | 2018-10-25 |
Holding Device App 20180122659 - TSUCHIDA; Atsushi ;   et al. | 2018-05-03 |
Ceramic Heater App 20180096868 - KITABAYASHI; Tetsuo ;   et al. | 2018-04-05 |
Holding Apparatus App 20180076067 - KITABAYASHI; Tetsuo ;   et al. | 2018-03-15 |
Electrostatic chuck Grant 7,450,365 - Miyaji , et al. November 11, 2 | 2008-11-11 |
Electrostatic chuck Grant D561,206 - Kitabayashi February 5, 2 | 2008-02-05 |
Electrostatic chuck App 20070258187 - Miyaji; Jun ;   et al. | 2007-11-08 |
Electrostatic chuck Grant 7,248,457 - Miyaji , et al. July 24, 2 | 2007-07-24 |
Electrostatic chuck App 20070109713 - Miyaji; Jun ;   et al. | 2007-05-17 |
Electrostatic chuck for an electrically insulative substrate, and a method of using same Grant 7,209,339 - Kitabayashi , et al. April 24, 2 | 2007-04-24 |
Method for attracting glass substrate with electrostatic chuck and electrostatic chuck App 20060158822 - Kondo; Shunpei ;   et al. | 2006-07-20 |
Electrostatic chuck for an electrically insulative substrate, and a method of using same App 20040218340 - Kitabayashi, Tetsuo ;   et al. | 2004-11-04 |
Electrostatic chuck and processing apparatus for insulative substrate Grant 6,768,627 - Kitabayashi , et al. July 27, 2 | 2004-07-27 |
Electrostastic chuck Grant 5,530,616 - Kitabayashi , et al. June 25, 1 | 1996-06-25 |
Electrostatic chuck Grant 5,384,681 - Kitabayashi , et al. January 24, 1 | 1995-01-24 |
Electrostatic chuck Grant 5,384,682 - Watanabe , et al. January 24, 1 | 1995-01-24 |
Electrostatic chuck Grant 5,151,845 - Watanabe , et al. September 29, 1 | 1992-09-29 |
Method of and apparatus for applying voltage to electrostatic chuck Grant 5,117,121 - Watanabe , et al. May 26, 1 | 1992-05-26 |
Dielectric ceramics for electrostatic chucks and method of making them Grant 5,104,834 - Watanabe , et al. April 14, 1 | 1992-04-14 |
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