KITABATA; Masaki
Patent Applications and Registrations
Patent applications and USPTO patent grants for KITABATA; Masaki.The latest application filed is for "cleaning device and cleaning method".
- KITABATA; Masaki - Toyama JP
| Patent | Date |
|---|---|
| Cleaning Device And Cleaning Method App 20100078043 - KITABATA; Masaki ; et al. | 2010-04-01 |
| Dry Etching Method And Dry Etching Apparatus App 20090026172 - KITABATA; Masaki ; et al. | 2009-01-29 |
| Monitoring System And Monitoring Method For Substrate Production Apparatus App 20080314316 - Kitabata; Masaki | 2008-12-25 |
| Thin film coating device, thin film coating method, immersion exposure device, and immersion exposure method App 20050276908 - Kitabata, Masaki ; et al. | 2005-12-15 |
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