loadpatents
Patent applications and USPTO patent grants for KITA; Masatomo.The latest application filed is for "transfer system, transfer device, and transfer method".
Patent | Date |
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Transfer System, Transfer Device, And Transfer Method App 20220277981 - AMIKURA; Norihiko ;   et al. | 2022-09-01 |
Storage Container And Processing System App 20220243336 - AMIKURA; Norihiko ;   et al. | 2022-08-04 |
Substrate Processing Apparatus App 20220230898 - DOGOME; Masahiro ;   et al. | 2022-07-21 |
Substrate Processing Apparatus App 20220208576 - DOGOME; Masahiro ;   et al. | 2022-06-30 |
Transfer Apparatus App 20220208574 - Dogome; Masahiro ;   et al. | 2022-06-30 |
Detection Device, Processing System, And Transfer Method App 20220148857 - AMIKURA; Norihiko ;   et al. | 2022-05-12 |
Processing System And Transfer Method App 20220130695 - Amikura; Norihiko ;   et al. | 2022-04-28 |
Substrate Processing Apparatus, Purge Gas Control Method, And Vacuum Transfer Chamber Cleaning Method App 20220080476 - AMIKURA; Norihiko ;   et al. | 2022-03-17 |
Transfer Apparatus And Transfer Method App 20220068689 - AMIKURA; Norihiko ;   et al. | 2022-03-03 |
Transfer Device, Transfer System, And End Effector App 20220051928 - AMIKURA; Norihiko ;   et al. | 2022-02-17 |
Storage Module, Substrate Processing System, And Method Of Transferring Consumable Member App 20210398838 - AMIKURA; Norihiko ;   et al. | 2021-12-23 |
Substrate Processing System, Vacuum Substrate Transfer Module, And Substrate Transfer Method App 20210287927 - AMIKURA; Norihiko ;   et al. | 2021-09-16 |
Substrate Transfer System And Load Lock Module App 20210280441 - AMIKURA; Norihiko ;   et al. | 2021-09-09 |
Particle generation preventing method and vacuum apparatus Grant 10,643,825 - Tetsuka , et al. | 2020-05-05 |
Particle Generation Preventing Method And Vacuum Apparatus App 20190108987 - TETSUKA; Takashi ;   et al. | 2019-04-11 |
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