loadpatents
Patent applications and USPTO patent grants for Kishimura; Shinji.The latest application filed is for "sulfonamide compound, polymer compound, resist material and pattern formation method".
Patent | Date |
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Resist material and pattern formation method Grant 7,588,876 - Kishimura , et al. September 15, 2 | 2009-09-15 |
Sulfonamide compound, polymer compound, resist material and pattern formation method Grant 7,413,843 - Kishimura , et al. August 19, 2 | 2008-08-19 |
Resist material and pattern formation method Grant 7,378,216 - Kishimura , et al. May 27, 2 | 2008-05-27 |
Polymer, resist composition, and patterning process Grant 7,241,553 - Hatakeyama , et al. July 10, 2 | 2007-07-10 |
Sulfonamide compound, polymer compound, resist material and pattern formation method App 20070099117 - Kishimura; Shinji ;   et al. | 2007-05-03 |
Polymers, resist compositions and patterning process Grant 7,169,869 - Harada , et al. January 30, 2 | 2007-01-30 |
Polymer compound, resist material and pattern formation method Grant 7,169,530 - Kishimura , et al. January 30, 2 | 2007-01-30 |
Sulfonamide compound, polymer compound, resist material and pattern formation method Grant 7,166,418 - Kishimura , et al. January 23, 2 | 2007-01-23 |
Sulfonates, polymers, resist compositions and patterning process Grant 7,125,642 - Harada , et al. October 24, 2 | 2006-10-24 |
Polymers, resist compositions and patterning process Grant 7,125,643 - Harada , et al. October 24, 2 | 2006-10-24 |
Polymers, resist compositions and patterning process Grant 7,125,641 - Harada , et al. October 24, 2 | 2006-10-24 |
Polymers, resist compositions and patterning process Grant 7,078,147 - Harada , et al. July 18, 2 | 2006-07-18 |
Polymers, resist compositions and patterning process Grant 7,067,231 - Harada , et al. June 27, 2 | 2006-06-27 |
Polymer compound, resist material and pattern formation method Grant 7,060,775 - Kishimura , et al. June 13, 2 | 2006-06-13 |
Pattern-forming material and method of forming pattern Grant 7,041,428 - Kishimura , et al. May 9, 2 | 2006-05-09 |
Polymers, resist compositions and patterning process Grant 7,005,228 - Hatakeyama , et al. February 28, 2 | 2006-02-28 |
Resist compositions and patterning process Grant 7,001,707 - Hatakeyama , et al. February 21, 2 | 2006-02-21 |
Resist material and pattern formation method App 20050277057 - Kishimura, Shinji ;   et al. | 2005-12-15 |
Resist material and pattern formation method App 20050266338 - Kishimura, Shinji ;   et al. | 2005-12-01 |
Resist material and pattern formation method App 20050266337 - Kishimura, Shinji ;   et al. | 2005-12-01 |
Polymers, resist compositions and patterning process App 20050267275 - Harada, Yuji ;   et al. | 2005-12-01 |
Polymer, resist composition, and patterning process App 20050221221 - Hatakeyama, Jun ;   et al. | 2005-10-06 |
Polymers, resist compositions and patterning process Grant 6,946,235 - Harada , et al. September 20, 2 | 2005-09-20 |
Polymer compound, resist material and pattern formation method App 20050186501 - Kishimura, Shinji ;   et al. | 2005-08-25 |
Polymers, resist compositions and patterning process Grant 6,933,095 - Harada , et al. August 23, 2 | 2005-08-23 |
Polymer, resist composition, and patterning process App 20050175935 - Harada, Yuji ;   et al. | 2005-08-11 |
Esters, polymers, resist compositions and patterning process Grant 6,916,592 - Harada , et al. July 12, 2 | 2005-07-12 |
Polymers, resist compositions and patterning process App 20050089797 - Harada, Yuji ;   et al. | 2005-04-28 |
Resist compositions and patterning process App 20050084796 - Hatakeyama, Jun ;   et al. | 2005-04-21 |
Polymer compound, resist material and pattern formation method App 20050074693 - Kishimura, Shinji ;   et al. | 2005-04-07 |
Resist compositions and patterning process Grant 6,875,556 - Harada , et al. April 5, 2 | 2005-04-05 |
Polymers, resist compositions and patterning process Grant 6,872,514 - Harada , et al. March 29, 2 | 2005-03-29 |
Sulfonamide compound, polymer compound, resist material and pattern formation method App 20050058935 - Kishimura, Shinji ;   et al. | 2005-03-17 |
Polymers, resist compositions and patterning process Grant 6,864,037 - Hatakeyama , et al. March 8, 2 | 2005-03-08 |
Polymers, resist compositions and patterning process Grant 6,861,197 - Harada , et al. March 1, 2 | 2005-03-01 |
Chemically amplified resist compositions and patterning process Grant 6,855,477 - Hatakeyama , et al. February 15, 2 | 2005-02-15 |
Pattern forming material and method of pattern formation Grant 6,830,869 - Kishimura , et al. December 14, 2 | 2004-12-14 |
Polymers, resist compositions and patterning process Grant 6,824,955 - Harada , et al. November 30, 2 | 2004-11-30 |
Pattern formation material and pattern formation method Grant 6,806,029 - Kishimura , et al. October 19, 2 | 2004-10-19 |
Resist compositions and patterning process Grant 6,790,586 - Hatakeyama , et al. September 14, 2 | 2004-09-14 |
Polymers, resist compositions and patterning process App 20040157155 - Harada, Yuji ;   et al. | 2004-08-12 |
Sulfonates, polymers, resist compositions and patterning process App 20040157156 - Harada, Yuji ;   et al. | 2004-08-12 |
Resist compositions and patterning process App 20040144752 - Harada, Yuji ;   et al. | 2004-07-29 |
Pattern formation material and pattern formation method Grant 6,753,132 - Kishimura , et al. June 22, 2 | 2004-06-22 |
Pattern formation material and method Grant 6,737,213 - Kishimura , et al. May 18, 2 | 2004-05-18 |
Polymers, resist compositions and patterning process Grant 6,710,148 - Harada , et al. March 23, 2 | 2004-03-23 |
Pattern forming material and method of pattern formation App 20040043321 - Kishimura, Shinji ;   et al. | 2004-03-04 |
Pattern-forming material and method of forming pattern App 20040029035 - Kishimura, Shinji ;   et al. | 2004-02-12 |
Polymers, resist compositions and patterning process App 20040030079 - Harada, Yuji ;   et al. | 2004-02-12 |
Pattern formation material and pattern formation method Grant 6,689,536 - Kishimura , et al. February 10, 2 | 2004-02-10 |
Pattern formation method Grant 6,673,523 - Kishimura , et al. January 6, 2 | 2004-01-06 |
Polymers, resist compositions and patterning process Grant 6,660,447 - Hatakeyama , et al. December 9, 2 | 2003-12-09 |
Novel esters, polymers, resist compositions and patterning process App 20030219678 - Harada, Yuji ;   et al. | 2003-11-27 |
Polymers, resist compositions and patterning process App 20030215739 - Harada, Yuji ;   et al. | 2003-11-20 |
Polymers, resist compositions and patterning process App 20030215740 - Harada, Yuji ;   et al. | 2003-11-20 |
Pattern formation material and pattern formation method Grant 6,645,694 - Kishimura , et al. November 11, 2 | 2003-11-11 |
Pattern formation material and pattern formation method Grant 6,632,582 - Kishimura , et al. October 14, 2 | 2003-10-14 |
Polymers, resist compositions and patterning process App 20030165773 - Harada, Yuji ;   et al. | 2003-09-04 |
Ester compounds Grant 6,603,037 - Harada , et al. August 5, 2 | 2003-08-05 |
Pattern formation material and pattern formation method App 20030113670 - Kishimura, Shinji ;   et al. | 2003-06-19 |
Novel Ester Compounds App 20030100791 - Harada, Yuji ;   et al. | 2003-05-29 |
Chemically amplified resist compositions and patterning process App 20030099901 - Hatakeyama, Jun ;   et al. | 2003-05-29 |
Pattern formation material and pattern formation method App 20030091930 - Kishimura, Shinji ;   et al. | 2003-05-15 |
Pattern formation method App 20030091941 - Kishimura, Shinji ;   et al. | 2003-05-15 |
Pattern formation material and pattern formation method App 20030087184 - Kishimura, Shinji ;   et al. | 2003-05-08 |
Polymers, resist compositions and patterning process App 20030082479 - Hatakeyama, Jun ;   et al. | 2003-05-01 |
Pattern formation method Grant 6,528,240 - Kishimura , et al. March 4, 2 | 2003-03-04 |
Polymers, resist compositions and patterning process App 20030031952 - Harada, Yuji ;   et al. | 2003-02-13 |
Polymers, resist compositions and patterning process App 20030031953 - Hatakeyama, Jun ;   et al. | 2003-02-13 |
Polymers, resist compositions and patterning process App 20030008231 - Harada, Yuji ;   et al. | 2003-01-09 |
Pattern formation material and pattern formation method App 20020197557 - Kishimura, Shinji ;   et al. | 2002-12-26 |
Polymers, resist compositions and patterning process App 20020161148 - Harada, Yuji ;   et al. | 2002-10-31 |
Polymers, resist compositions and patterning process App 20020051937 - Hatakeyama, Jun ;   et al. | 2002-05-02 |
Polymers, resist compositions and patterning process App 20020051936 - Harada, Yuji ;   et al. | 2002-05-02 |
Resist compositions and patterning process App 20020051935 - Hatakeyama, Jun ;   et al. | 2002-05-02 |
Polymers, resist compositions and patterning process App 20020048724 - Harada, Yuji ;   et al. | 2002-04-25 |
Pattern formation material and pattern formation method App 20020039700 - Kishimura, Shinji ;   et al. | 2002-04-04 |
Pattern formation material and pattern formation method App 20020037471 - Kishimura, Shinji ;   et al. | 2002-03-28 |
Pattern formation material and pattern formation method App 20020012870 - Kishimura, Shinji ;   et al. | 2002-01-31 |
Pattern formation material and pattern formation method App 20020013059 - Kishimura, Shinji ;   et al. | 2002-01-31 |
Pattern formation method App 20010049075 - Kishimura, Shinji ;   et al. | 2001-12-06 |
Pattern formation material and method App 20010033999 - Kishimura, Shinji ;   et al. | 2001-10-25 |
Pattern formation material and method App 20010028989 - Kishimura, Shinji ;   et al. | 2001-10-11 |
Method of forming a resist pattern Grant 6,124,081 - Kishimura September 26, 2 | 2000-09-26 |
Method of manufacturing a semiconductor device and a resist composition used therein Grant 5,591,654 - Kishimura January 7, 1 | 1997-01-07 |
Method of forming and removing resist pattern Grant 5,426,016 - Fujioka , et al. June 20, 1 | 1995-06-20 |
Method of forming patterns Grant 5,123,998 - Kishimura June 23, 1 | 1992-06-23 |
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