Kishikawa; Yasuhiro

Patent Applications and Registrations

Patent applications and USPTO patent grants for Kishikawa; Yasuhiro.The latest application filed is for "exposure apparatus and device manufacturing method".

Company Profile

0.10.10

Kishikawa; Yasuhiro - Utsunomiya JP
Kishikawa; Yasuhiro - Utsunomiya-shi JP
Kishikawa; Yasuhiro - Tochigi JP
Kishikawa; Yasuhiro - Tochogi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Exposure apparatus and device manufacturing method using original with phase-modulation diffraction grating to form interference pattern Grant 9,164,370 - Kishikawa , et al. October 20, 2	2015-10-20
Exposure apparatus Grant 7,733,461 - Kishikawa June 8, 2	2010-06-08
Exposure Apparatus And Device Manufacturing Method App 20090257039 - Kishikawa; Yasuhiro ; et al.	2009-10-15
Method and apparatus for measuring birefringence Grant 7,286,226 - Takeuchi , et al. October 23, 2	2007-10-23
Birefringence measurement apparatus, strain remover, polarimeter and exposure apparatus Grant 7,251,029 - Kishikawa , et al. July 31, 2	2007-07-31
Polarization state detecting system, light source, and exposure apparatus Grant 7,180,051 - Takeuchi , et al. February 20, 2	2007-02-20
Beam splitting apparatus, transmittance measurement apparatus, and exposure apparatus Grant 7,161,675 - Kishikawa , et al. January 9, 2	2007-01-09
Exposure apparatus App 20060290912 - Kishikawa; Yasuhiro	2006-12-28
Beam splitting apparatus, transmittance measurement apparatus, and exposure apparatus Grant 7,095,497 - Kishikawa , et al. August 22, 2	2006-08-22
Exposure apparatus that acquires information regarding a polarization state of light from a light source Grant 7,015,456 - Takeuchi , et al. March 21, 2	2006-03-21
Polarization state detecting system, light source, and exposure apparatus App 20060033019 - Takeuchi; Seiji ; et al.	2006-02-16
Beam splitting apparatus, transmittance measurement apparatus, and exposure apparatus Grant 6,992,763 - Kishikawa , et al. January 31, 2	2006-01-31
Exposure apparatus and method App 20050185155 - Kishikawa, Yasuhiro	2005-08-25
Beam splitting apparatus, transmittance measurement apparatus, and exposure apparatus App 20040223443 - Kishikawa, Yasuhiro ; et al.	2004-11-11
Beam splitting apparatus, transmittance measurement apparatus, and exposure apparatus App 20040223228 - Kishikawa, Yasuhiro ; et al.	2004-11-11
Method and apparatus for measuring birefringence App 20040156051 - Takeuchi, Seiji ; et al.	2004-08-12
Birefringence measurement apparatus, strain remover, polarimeter and exposure apparatus App 20040008348 - Kishikawa, Yasuhiro ; et al.	2004-01-15
Polarization state detecting system, light source, and exposure apparatus App 20030234348 - Takeuchi, Seiji ; et al.	2003-12-25
Beam splitting apparatus, transmittance measurement apparatus, and exposure apparatus App 20030043376 - Kishikawa, Yasuhiro ; et al.	2003-03-06

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