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Patent applications and USPTO patent grants for Kiryu; Hideki.The latest application filed is for "method for film formation of gate insulator, apparatus for film formation of gate insulator, and cluster tool".
Patent | Date |
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Method of forming a dielectric film Grant 6,866,890 - Kiryu , et al. March 15, 2 | 2005-03-15 |
Method for film formation of gate insulator, apparatus for film formation of gate insulator, and cluster tool App 20040053472 - Kiryu, Hideki ;   et al. | 2004-03-18 |
Method of forming a dielectric film App 20040005408 - Kiryu, Hideki ;   et al. | 2004-01-08 |
Method and system for forming a stacked gate insulating film Grant 6,617,207 - Kiryu , et al. September 9, 2 | 2003-09-09 |
Processing apparatus and processing method Grant 6,467,491 - Sugiura , et al. October 22, 2 | 2002-10-22 |
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