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Patent applications and USPTO patent grants for Kinney; Charles.The latest application filed is for "system and method to adaptively pre-compensate for target material push-out to optimize extreme ultraviolet light production".
Patent | Date |
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System and method to adaptively pre-compensate for target material push-out to optimize extreme ultraviolet light production Grant 9,588,430 - van der Burgt , et al. March 7, 2 | 2017-03-07 |
System and Method to Adaptively Pre-Compensate for Target Material Push-Out to Optimize Extreme Ultraviolet Light Production App 20160202614 - van der Burgt; Jeroen ;   et al. | 2016-07-14 |
System and method to adaptively pre-compensate for target material push-out to optimize extreme ultraviolet light production Grant 9,238,243 - van der Burgt , et al. January 19, 2 | 2016-01-19 |
System and Method to Adaptively Pre-Compensate for Target Material Push-Out to Optimize Extreme Ultraviolet Light Production App 20140091239 - van der Burgt; Jeroen ;   et al. | 2014-04-03 |
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