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Etching method and photomask blank processing method Grant 8,920,666 - Igarashi , et al. December 30, 2 | 2014-12-30 |
Photomask making method Grant 8,309,277 - Igarashi , et al. November 13, 2 | 2012-11-13 |
Photomask Making Method App 20100316942 - IGARASHI; Shinichi ;   et al. | 2010-12-16 |
Etching Method And Photomask Blank Processing Method App 20100291478 - IGARASHI; Shinichi ;   et al. | 2010-11-18 |
Photomask blank, photomask and fabrication method thereof Grant 7,771,893 - Yoshikawa , et al. August 10, 2 | 2010-08-10 |
Half-tone stacked film, photomask-blank, photomask and fabrication method thereof Grant 7,625,677 - Yoshikawa , et al. December 1, 2 | 2009-12-01 |
Photomask blank, photomask and fabrication method thereof Grant 7,625,676 - Yoshikawa , et al. December 1, 2 | 2009-12-01 |
Photomask blank, photomask and method for producing those Grant 7,618,753 - Yoshikawa , et al. November 17, 2 | 2009-11-17 |
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Mask for charged particle beam exposure, and method of forming the same Grant 7,232,631 - Morimoto , et al. June 19, 2 | 2007-06-19 |
Photomask blank, photomask and fabrication method thereof App 20070020534 - Yoshikawa; Hiroki ;   et al. | 2007-01-25 |
Half-tone stacked film, photomask-blank, photomask and fabrication method thereof App 20060177746 - Yoshikawa; Hiroki ;   et al. | 2006-08-10 |
Photomask blank, photomask and fabrication method thereof App 20060088774 - Yoshikawa; Hiroki ;   et al. | 2006-04-27 |
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Halftone phase shift photomask and blank for halftone phase shift photomask Grant 6,599,667 - Yusa , et al. July 29, 2 | 2003-07-29 |
Photomask App 20020119379 - Noguchi, Kenji ;   et al. | 2002-08-29 |
Halftone phase shift photomask and blank for halftone phase shift photomask App 20020039689 - Yusa, Satoshi ;   et al. | 2002-04-04 |
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Polymeric material for liquid crystal/polymer composite film, record display medium, and use thereof Grant 5,851,422 - Saito , et al. December 22, 1 | 1998-12-22 |