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Semiconductor device, angle value correction circuit and method therefor
Grant 10,969,400 - Shibuya , et al. April 6, 2 | 2021-04-06 |
Data processing method, data processing apparatus, and multiple charged-particle beam writing apparatus
Grant 10,886,103 - Hasegawa , et al. January 5, 2 | 2021-01-05 |
Data Processing Method, Data Processing Apparatus, And Multiple Charged-particle Beam Writing Apparatus
App 20190378688 - HASEGAWA; Kei ; et al. | 2019-12-12 |
Multi charged particle beam writing apparatus and multi charged particle beam writing method
Grant 10,483,087 - Hasegawa , et al. Nov | 2019-11-19 |
Drawing device and drawing method
Grant 10,475,621 - Hasegawa , et al. Nov | 2019-11-12 |
Semiconductor Device, Angle Value Correction Circuit And Method Therefor
App 20190137535 - SHIBUYA; Yoshitaka ; et al. | 2019-05-09 |
Drawing Device And Drawing Method
App 20180350560 - HASEGAWA; Kei ; et al. | 2018-12-06 |
Diagnosis method, charged particle beam lithography apparatus, and recording medium
Grant 10,109,454 - Hasegawa , et al. October 23, 2 | 2018-10-23 |
Multi-charged particle beam writing apparatus and multi-charged particle beam writing method
Grant 9,953,800 - Hasegawa , et al. April 24, 2 | 2018-04-24 |
Multi charged particle beam writing apparatus and multi charged particle beam writing method
Grant 9,934,935 - Yoshikawa , et al. April 3, 2 | 2018-04-03 |
Multi Charged Particle Beam Writing Apparatus And Multi Charged Particle Beam Writing Method
App 20180005799 - HASEGAWA; Kei ; et al. | 2018-01-04 |
Diagnosis Method, Charged Particle Beam Lithography Apparatus, And Recording Medium
App 20170243714 - HASEGAWA; Kei ; et al. | 2017-08-24 |
Multi Charged Particle Beam Writing Apparatus And Multi Charged Particle Beam Writing Method
App 20170047194 - YOSHIKAWA; Ryoichi ; et al. | 2017-02-16 |
Multi-charged Particle Beam Writing Apparatus And Multi-charged Particle Beam Writing Method
App 20160322196 - HASEGAWA; Kei ; et al. | 2016-11-03 |
Output control scan flip-flop, semiconductor integrated circuit including the same, and design method for semiconductor integrated circuit
Grant 8,892,971 - Kimura November 18, 2 | 2014-11-18 |
Output Control Scan Flip-flop, Semiconductor Integrated Circuit Including The Same, And Design Method For Semiconductor Integrated Circuit
App 20130055040 - KIMURA; Hayato | 2013-02-28 |
Pattern writing circuit self-diagnosis method for charged beam photolithography apparatus and charged beam photolithography apparatus
Grant 7,900,185 - Kimura , et al. March 1, 2 | 2011-03-01 |
Writing error diagnosis method for charged particle beam photolithography apparatus and charged particle beam photolithography apparatus
Grant 7,598,504 - Kimura , et al. October 6, 2 | 2009-10-06 |
Charged-particle beam pattern writing method and apparatus and software program for use therein
Grant 7,589,335 - Matsukawa , et al. September 15, 2 | 2009-09-15 |
Charged beam drawing apparatus and charged beam drawing method
Grant 7,476,881 - Hattori , et al. January 13, 2 | 2009-01-13 |
Writing Error Diagnosis Method For Charged Particle Beam Photolithography Apparatus And Charged Particle Beam Photolithography Apparatus
App 20080067423 - Kimura; Hayato ; et al. | 2008-03-20 |
Pattern Writing Circuit Self-diagnosis Method For Charged Beam Photolithography Apparatus And Charged Beam Photolithography Apparatus
App 20080067426 - Kimura; Hayato ; et al. | 2008-03-20 |
Charged-particle Beam Pattern Writing Method And Apparatus And Software Program For Use Therein
App 20080011965 - Matsukawa; Takuya ; et al. | 2008-01-17 |
Charged Beam Drawing Apparatus And Charged Beam Drawing Method
App 20070114461 - HATTORI; Kiyoshi ; et al. | 2007-05-24 |
Photosensor device and disk inspection apparatus using it
Grant 7,057,157 - Kimura , et al. June 6, 2 | 2006-06-06 |
Photosensor device and disk inspection apparatus using it
App 20020079434 - Kimura, Hayato ; et al. | 2002-06-27 |
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