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Patent applications and USPTO patent grants for Kimoto; Tomohisa.The latest application filed is for "raw material supply apparatus and film forming apparatus".
Patent | Date |
---|---|
Valve device, processing apparatus, and control method Grant 11,306,847 - Kimoto , et al. April 19, 2 | 2022-04-19 |
Source material container Grant 11,193,205 - Furuya , et al. December 7, 2 | 2021-12-07 |
Raw Material Supply Apparatus And Film Forming Apparatus App 20210324513 - KIMOTO; Tomohisa ;   et al. | 2021-10-21 |
Pipe Heating Device and Substrate Processing Apparatus App 20200182390 - KIMOTO; Tomohisa ;   et al. | 2020-06-11 |
Valve Device, Processing Apparatus, And Control Method App 20200056724 - KIMOTO; Tomohisa ;   et al. | 2020-02-20 |
Source Material Container App 20190180988 - FURUYA; Yuichi ;   et al. | 2019-06-13 |
Device And Method For Transferring Substrate For Forming Compund Semiconductor Film, And System And Method For Forming Compund Semiconductor Film App 20160148829 - MORISAKI; Eisuke ;   et al. | 2016-05-26 |
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