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Organic layer composition, organic layer, and method of forming patterns Grant 10,066,057 - Park , et al. September 4, 2 | 2018-09-04 |
Hardmask composition and method of forming patterns using the hardmask composition Grant 10,018,914 - Nam , et al. July 10, 2 | 2018-07-10 |
Monomer For A Hardmask Composition, Hardmask Composition Comprising The Monomer, And Method For Forming A Pattern Using The Hardmask Composition App 20170327640 - KIM; Yun-Jun ;   et al. | 2017-11-16 |
Monomer for a hardmask composition, hardmask composition comprising the monomer, and method for forming a pattern using the hardmask composition Grant 9,725,389 - Kim , et al. August 8, 2 | 2017-08-08 |
Monomer for hardmask composition, hardmask composition including the monomer, and method of forming patterns using the hardmask composition Grant 9,683,114 - Kim , et al. June 20, 2 | 2017-06-20 |
Monomer for hardmask composition, hardmask composition including said monomer, and method for forming pattern using said hardmask composition Grant 9,671,688 - Shin , et al. June 6, 2 | 2017-06-06 |
Hardmask composition, method of forming patterns using the hardmask composition and semiconductor integrated circuit device including the patterns Grant 9,665,003 - Choi , et al. May 30, 2 | 2017-05-30 |
Monomer, hardmask composition including monomer, and method for forming pattern by using hardmask composition Grant 9,556,094 - Kim , et al. January 31, 2 | 2017-01-31 |
Organic Layer Composition, Organic Layer, And Method Of Forming Patterns App 20160297932 - PARK; Yu-Shin ;   et al. | 2016-10-13 |
Monomer, Organic Layer Composition, Organic Layer, And Method Of Forming Patterns App 20160237306 - Choi; Yoo-Jeong ;   et al. | 2016-08-18 |
Hardmask composition and method of forming patterns using the hardmask composition Grant 9,371,444 - Choi , et al. June 21, 2 | 2016-06-21 |
Monomer for hardmask composition, hardmask composition including monomer, and pattern forming method using hardmask composition Grant 9,359,276 - Choi , et al. June 7, 2 | 2016-06-07 |
Hardmask composition and method of forming patterns using the hardmask composition Grant 9,348,229 - Nam , et al. May 24, 2 | 2016-05-24 |
Method Of Producing Layer Structure, Layer Structure, And Method Of Forming Patterns App 20160126088 - KIM; Min-Soo ;   et al. | 2016-05-05 |
Hardmask Composition And Method Of Forming Patterns Using The Hardmask Composition App 20150329718 - CHOI; Yoo-Jeong ;   et al. | 2015-11-19 |
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Monomer For Hardmask Composition, Hardmask Composition Including Said Monomer, And Method For Forming Pattern Using Said Hardmask Composition App 20150301446 - SHIN; Seung-Wook ;   et al. | 2015-10-22 |
Monomer, Hardmask Composition Including Monomer, And Method For Forming Pattern By Using Hardmask Composition App 20150274622 - Kim; Yun-Jun ;   et al. | 2015-10-01 |
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Hardmask Composition, Method Of Forming Patterns Using The Hardmask Composition And Semiconductor Integrated Circuit Device Including The Patterns App 20150187566 - PARK; Yu-Shin ;   et al. | 2015-07-02 |
Hardmask Composition And Method Of Forming Patterns Using The Hardmask Composition App 20150187589 - NAM; Youn-Hee ;   et al. | 2015-07-02 |
Hardmask composition and method of forming patterns and semiconductor integrated circuit device including the patterns Grant 8,952,373 - Choi , et al. February 10, 2 | 2015-02-10 |
Monomer For Hardmask Composition, Hardmask Composition Including Monomer, And Pattern Forming Method Using Hardmask Composition App 20150008212 - Choi; Yoo-Jeong ;   et al. | 2015-01-08 |
Monomer For Hardmask Composition And Hardmask Composition Including The Monomer And Method Of Forming Patterns Using The Hardmask Composition App 20150001178 - SONG; Hyun-Ji ;   et al. | 2015-01-01 |
Hardmask Composition, Method Of Forming Patterns Using The Hardmask Composition And Semiconductor Integrated Circuit Device Including The Patterns App 20150004531 - CHOI; Yoo-Jeong ;   et al. | 2015-01-01 |
Monomer For A Hardmask Composition, Hardmask Composition Comprising The Monomer, And Method For Forming A Pattern Using The Hardmask Composition App 20140342273 - Kim; Yun-Jun ;   et al. | 2014-11-20 |
Hardmask Composition And Method Of Forming Patterns And Semiconductor Integrated Circuit Device Including The Patterns App 20140183701 - CHOI; Yoo-Jeong ;   et al. | 2014-07-03 |
Monomer For Hardmask Composition And Hardmask Composition Including The Monomer And Method Of Forming Patterns Using The Hardmask Composition App 20140186775 - LEE; Bum-Jin ;   et al. | 2014-07-03 |