Kim; Yi Hwan
Patent Applications and Registrations
Patent applications and USPTO patent grants for Kim; Yi Hwan.The latest application filed is for "semiconductor process chamber including lower volume upper dome".
- Kim; Yi Hwan - Seongnam-si KR
| Patent | Date |
|---|---|
| Precleaning apparatus and substrate processing system Grant 10,790,133 - Park , et al. September 29, 2 | 2020-09-29 |
| Semiconductor Process Chamber Including Lower Volume Upper Dome App 20180355510 - Park; Keum Seok ; et al. | 2018-12-13 |
| Precleaning Apparatus and Substrate Processing System App 20180025901 - Park; Keum Seok ; et al. | 2018-01-25 |
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