Kim; Troy
Patent Applications and Registrations
Patent applications and USPTO patent grants for Kim; Troy.The latest application filed is for "cleaning of cvd chambers using remote source with cxfyoz based chemistry".
- Kim; Troy - Mountain View CA
| Patent | Date |
|---|---|
| Boron diffusion barrier by nitrogen incorporation in spacer dielectrics Grant 7,132,353 - Xia , et al. November 7, 2 | 2006-11-07 |
| Heated gas distribution plate for a processing chamber Grant 6,946,033 - Tsuei , et al. September 20, 2 | 2005-09-20 |
| Cleaning of CVD chambers using remote source with cxfyoz based chemistry Grant 6,923,189 - Lakshmanan , et al. August 2, 2 | 2005-08-02 |
| Cleaning of CVD chambers using remote source with CXFYOZ based chemistry App 20040139983 - Lakshmanan, Annamalai ; et al. | 2004-07-22 |
| Methods for operating a chemical vapor deposition chamber using a heated gas distribution plate App 20040052969 - Lee, Ju-Hyung ; et al. | 2004-03-18 |
| Heated gas distribution plate for a processing chamber App 20040050492 - Tsuei, Lun ; et al. | 2004-03-18 |
| Reacting an organosilicon compound with an oxidizing gas to form an ultra low k dielectric App 20030211244 - Li, Lihua ; et al. | 2003-11-13 |
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