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Methods of forming metal-nitride layers in contact holes Grant 7,541,282 - Han , et al. June 2, 2 | 2009-06-02 |
Method of forming titanium nitride layer and method of fabricating capacitor using the same Grant 7,524,724 - Kim , et al. April 28, 2 | 2009-04-28 |
Semiconductor memory device having low-resistance tungsten line and method of manufacturing the semiconductor memory device Grant 7,504,725 - Kim , et al. March 17, 2 | 2009-03-17 |
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