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Kim; Kye-Weon Patent Filings

Kim; Kye-Weon

Patent Applications and Registrations

Patent applications and USPTO patent grants for Kim; Kye-Weon.The latest application filed is for "method and apparatus for controlling light intensity and for exposing a semiconductor substrate".

Company Profile
0.6.9
  • Kim; Kye-Weon - Suwon-si KR
  • Kim; Kye-Weon - Gyeonggi-do KR
  • Kim; Kye-Weon - Suwon KR
  • Kim, Kye-Weon - Suwon-city KR
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Method and apparatus for inspecting substrate pattern
Grant 7,385,689 - Kim , et al. June 10, 2
2008-06-10
Apparatus and method for measuring a thickness of a substrate
Grant 7,355,729 - Park , et al. April 8, 2
2008-04-08
Method And Apparatus For Controlling Light Intensity And For Exposing A Semiconductor Substrate
App 20070190438 - KIM; Kye-Weon ;   et al.
2007-08-16
Test Pattern And Method For Measuring Silicon Etching Depth
App 20070184565 - PARK; Hwan-Shik ;   et al.
2007-08-09
Adsorption apparatus, semiconductor device manufacturing facility comprising the same, and method of recycling perfulorocompounds
App 20070028771 - Shin; Ji-Young ;   et al.
2007-02-08
Method and apparatus for obtaining an image using a selective combination of wavelengths of light
Grant 7,081,952 - Kim , et al. July 25, 2
2006-07-25
Method and apparatus for inspecting substrate pattern
App 20060039598 - Kim; Kye-Weon ;   et al.
2006-02-23
Apparatus and method for measuring a thickness of a substrate
App 20050083539 - Park, Hwan-Shik ;   et al.
2005-04-21
Method and apparatus for numerically analyzing grain growth on semiconductor wafer using SEM image
Grant 6,870,948 - Jun , et al. March 22, 2
2005-03-22
Method for measuring step difference in a semiconductor device and apparatus for performing the same
Grant 6,850,332 - Jun , et al. February 1, 2
2005-02-01
Method and apparatus for obtaining an image using a selective combination of wavelengths of light
App 20040109157 - Kim, Kye-Weon ;   et al.
2004-06-10
Method for inspecting a polishing pad in a semiconductor manufacturing process, an apparatus for performing the method, and a polishing device adopting the apparatus
Grant 6,650,408 - Jun , et al. November 18, 2
2003-11-18
Method for measuring step difference in a semiconductor device and apparatus for performing the same
App 20020074518 - Jun, Chung-Sam ;   et al.
2002-06-20
Method and apparatus for numerically analyzing grain growth on semiconductor wafer using SEM image
App 20020072133 - Jun, Chung-Sam ;   et al.
2002-06-13
Method for inspecting a polishing pad in a semiconductor manufacturing process, an apparatus for performing the method, and a polishing device adopting the apparatus
App 20020063860 - Jun, Chung-Sam ;   et al.
2002-05-30

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