Kim; Keehyun
Patent Applications and Registrations
Patent applications and USPTO patent grants for Kim; Keehyun.The latest application filed is for "gas injection system for etching profile control".
- Kim; Keehyun - Suwon-si KR
- Kim; Keehyun - Suwon KR
- KIM; Keehyun - Suwon-city KR
| Patent | Date |
|---|---|
| Plasma chemical reactor Grant 8,815,047 - Chae , et al. August 26, 2 | 2014-08-26 |
| Side gas injector for plasma reaction chamber Grant 8,652,296 - Kim , et al. February 18, 2 | 2014-02-18 |
| Plasma reactor and etching method using the same Grant 8,323,522 - Jang , et al. December 4, 2 | 2012-12-04 |
| Plasma reactor Grant 8,158,068 - Park , et al. April 17, 2 | 2012-04-17 |
| Gas Injection System For Etching Profile Control App 20110203735 - SEO; Seongsul ; et al. | 2011-08-25 |
| Apparatus For Controlling Temperature Of Electrostatic Chuck Comprising Two-stage Refrigerant Fluid Channel App 20110154843 - KO; Sungyong ; et al. | 2011-06-30 |
| Plasma Reactor And Etching Method Using The Same App 20110155694 - JANG; Hyeokjin ; et al. | 2011-06-30 |
| Side Gas Injector For Plasma Reaction Chamber App 20110079356 - Kim; Minshik ; et al. | 2011-04-07 |
| Color System For Etching Gas App 20110049111 - KO; Sungyong ; et al. | 2011-03-03 |
| Electrostatic Chuck Assembly For Plasma Reactor App 20100110605 - LEE; Weonmook ; et al. | 2010-05-06 |
| Plasma Reactor App 20090280040 - PARK; Kunjoo ; et al. | 2009-11-12 |
| Plasma Chemical Reactor App 20090129997 - CHAE; Hwankook ; et al. | 2009-05-21 |
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