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Patent applications and USPTO patent grants for Kim; Joo-Woo.The latest application filed is for "wafer alignment apparatus".
Patent | Date |
---|---|
Wafer alignment apparatus App 20070252993 - Lim; Kyu-Hong ;   et al. | 2007-11-01 |
Apparatus and method for inspecting a substrate Grant 7,289,661 - Jun , et al. October 30, 2 | 2007-10-30 |
Method for aligning a wafer and apparatus for performing the same Grant 7,235,411 - Lim , et al. June 26, 2 | 2007-06-26 |
Apparatus and method for inspecting patterns on wafers Grant 7,155,366 - Lee , et al. December 26, 2 | 2006-12-26 |
Apparatus and method for inspecting patterns on wafers App 20050119844 - Lee, Chang-Hoon ;   et al. | 2005-06-02 |
Method for aligning a wafer and apparatus for performing the same App 20050009214 - Lim, Kyu-Hong ;   et al. | 2005-01-13 |
Apparatus and method for inspecting a substrate App 20040086171 - Jun, Chung-Sam ;   et al. | 2004-05-06 |
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