loadpatents
Patent applications and USPTO patent grants for KIM; Ja-Yul.The latest application filed is for "control method of exposure apparatus and control apparatus of exposure apparatus".
Patent | Date |
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Control Method Of Exposure Apparatus And Control Apparatus Of Exposure Apparatus App 20190113847 - AHN; Sung-Min ;   et al. | 2019-04-18 |
Apparatus and method of controlling chuck, and exposure apparatus and control method thereof Grant 9,507,272 - Kim , et al. November 29, 2 | 2016-11-29 |
Apparatus And Method Of Controlling Chuck, And Exposure Apparatus And Control Method Thereof App 20160154320 - KIM; Ja Yul ;   et al. | 2016-06-02 |
Apparatus and method of controlling chuck, and exposure apparatus and control method thereof Grant 9,287,155 - Kim , et al. March 15, 2 | 2016-03-15 |
Ultra-precision Position Control Device And Method For Determining Position And Attitude Information Associated With A 6-degree-of-freedom Stage Thereof App 20130218304 - KIM; Ja Yul ;   et al. | 2013-08-22 |
Apparatus And Method Of Controlling Chuck, And Exposure Apparatus And Control Method Thereof App 20130001898 - KIM; Ja Yul ;   et al. | 2013-01-03 |
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