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Patent applications and USPTO patent grants for Kim; Hyeung-Yeul.The latest application filed is for "system and method detecting malfunction of pad conditioner in polishing apparatus".
Patent | Date |
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System and method detecting malfunction of pad conditioner in polishing apparatus Grant 7,128,637 - Kim , et al. October 31, 2 | 2006-10-31 |
System and method detecting malfunction of pad conditioner in polishing apparatus App 20060052036 - Kim; Hyeung-Yeul ;   et al. | 2006-03-09 |
Apparatus for polishing a wafer App 20030143933 - Baek, Soon-ki ;   et al. | 2003-07-31 |
Apparatus for polishing semiconductor wafer App 20030111176 - Choi, Jae-Won ;   et al. | 2003-06-19 |
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