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Patent applications and USPTO patent grants for Kim; Hyeog-Ki.The latest application filed is for "wafer container for receiving horizontally arranged wafers".
Patent | Date |
---|---|
Wafer storage container Grant 9,768,046 - Cho , et al. September 19, 2 | 2017-09-19 |
Wafer Container For Receiving Horizontally Arranged Wafers App 20170186637 - CHO; HYUN-HO ;   et al. | 2017-06-29 |
Wafer Storage Container App 20150311098 - CHO; Hyun-Ho ;   et al. | 2015-10-29 |
Wafer Holding Apparatus App 20140197068 - CHO; Hyun-Ho ;   et al. | 2014-07-17 |
Substrate processing apparatus and method of processing substrate while controlling for contamination in substrate transfer module Grant 6,996,453 - Ahn , et al. February 7, 2 | 2006-02-07 |
Apparatus and method for improved wafer transport ambient App 20050111935 - Kim, Hyeog-Ki ;   et al. | 2005-05-26 |
Substrate processing apparatus and method of processing substrate while controlling for contamination in substrate transfer module App 20040105738 - Ahn, Yo-Han ;   et al. | 2004-06-03 |
Cassette table of a semiconductor fabricating apparatus App 20030089313 - Ham, Dong-Seok ;   et al. | 2003-05-15 |
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