Patent | Date |
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Tungsten precursor Grant 10,618,925 - Lee , et al. | 2020-04-14 |
Tungsten Precursor, And Method For Depositing Tungsten-containing Film Comprising Same App 20180208617 - LEE; Sam Keun ;   et al. | 2018-07-26 |
Micro stage for particle beam column using piezo elements as actuator Grant 9,837,245 - Kim , et al. December 5, 2 | 2017-12-05 |
Micro-electron column having an electron emitter improving the density of an electron beam emitted from a nano structure tip Grant 9,673,016 - Kim , et al. June 6, 2 | 2017-06-06 |
Electrostatic quadrupole deflector for microcolumn Grant 9,666,407 - Oh , et al. May 30, 2 | 2017-05-30 |
Micro Stage using piezo elements App 20160268929 - KIM; Ho Seob ;   et al. | 2016-09-15 |
Micro-Electron Column Having An Electron Emitter Improving The Density Of An Electron Beam Emitted From A Nano Structure Tip App 20160247658 - KIM; Ho Seob ;   et al. | 2016-08-25 |
Micro-electron Column Having Nano Structure Tip With Easily Aligning App 20160247657 - KIM; Ho Seob ;   et al. | 2016-08-25 |
Electrostatic Quadrupole Deflector for Microcolumn App 20160247659 - OH; Tae Sik ;   et al. | 2016-08-25 |
Micro-column with double aligner Grant 9,196,454 - Oh , et al. November 24, 2 | 2015-11-24 |
Device for sustaining differential vacuum degrees for electron column Grant 8,912,506 - Kim December 16, 2 | 2014-12-16 |
Multi-particle beam column having an electrode layer including an eccentric aperture Grant 8,890,092 - Kim , et al. November 18, 2 | 2014-11-18 |
Ultra-miniaturized electron optical microcolumn Grant 8,835,848 - Oh , et al. September 16, 2 | 2014-09-16 |
Micro-column With Double Aligner App 20140239190 - OH; Tae Sik ;   et al. | 2014-08-28 |
Ultra-miniaturized Electron Optical Microcolumn App 20140224997 - OH; Tae Sik ;   et al. | 2014-08-14 |
Multi-particle Beam Column Having An Electrode Layer Including An Eccentric Aperture App 20140209813 - Kim; Ho Seob ;   et al. | 2014-07-31 |
Detector for electron column and method for detecting electrons for electron column Grant 8,324,573 - Kim December 4, 2 | 2012-12-04 |
Method for controlling electron beam in multi-microcolumn and multi-microcolumn using the same Grant 8,173,978 - Kim , et al. May 8, 2 | 2012-05-08 |
Portable electron microscope using micro-column Grant 8,071,944 - Kim , et al. December 6, 2 | 2011-12-06 |
Magnetic deflector for an electron column Grant 8,071,955 - Kim , et al. December 6, 2 | 2011-12-06 |
Micro-column with simple structure Grant 8,044,351 - Kim , et al. October 25, 2 | 2011-10-25 |
Hole inspection apparatus and hole inspection method using the same Grant 7,968,844 - Kim June 28, 2 | 2011-06-28 |
Inspection equipment for fine pattern and morphology using microcolumn Grant 7,935,926 - Kim May 3, 2 | 2011-05-03 |
Multipole Lens For Electron Column App 20110079731 - Kim; Ho Seob | 2011-04-07 |
Method for focusing electron beam in electron column Grant 7,902,521 - Kim , et al. March 8, 2 | 2011-03-08 |
Electron Emitter Having Nano-structure Tip And Electron Column Using The Same App 20100200766 - Kim; Ho Seob | 2010-08-12 |
Housing for A Micro-Column App 20100163745 - Kim; Ho Seob ;   et al. | 2010-07-01 |
Electron Column Using Cnt-tip And Method For Alignment Of Cnt-tip App 20100148656 - Kim; Ho Seob | 2010-06-17 |
Magnetic Deflector For An Electron Column App 20100148086 - Kim; Ho Seob ;   et al. | 2010-06-17 |
Electron Column Using A Magnetic Lens Layer Having Permanent Magnets App 20100084566 - Kim; Ho Seob | 2010-04-08 |
Method for Controlling Electron Beam in Multi-Microcolumn and Multi-Microcolumn Using The Same App 20100019166 - Kim; Ho Seob ;   et al. | 2010-01-28 |
Wafer-scale microcolumn array using low temperature co-fired ceramic substrate Grant 7,598,594 - Jeong , et al. October 6, 2 | 2009-10-06 |
Device For Sustaining Differential Vacuum Degrees For Electron Column App 20090224650 - Kim; Ho Seob | 2009-09-10 |
Method for Focusing Electron Beam in Electron Column App 20090200482 - Kim; Ho Seob ;   et al. | 2009-08-13 |
Hole Inspection Apparatus and Hole Inspection Method using the Same App 20090152461 - Kim; Ho Seob | 2009-06-18 |
Detector For Electron Column And Method For Detecting Electrons For Electron Column App 20090014650 - Kim; Ho Seob | 2009-01-15 |
Portable Electron Microscope Using Micro-Column App 20080315096 - Kim; Ho Seob ;   et al. | 2008-12-25 |
Method for Changing Energy of Electron Beam in Electron Column App 20080277584 - Kim; Ho Seob | 2008-11-13 |
Inspection Equipment for Fine Pattern and Morphology Using Microcolumn App 20080272298 - Kim; Ho Seob | 2008-11-06 |
Motioning Equipment for Electron Column App 20080210866 - Kim; Ho Seob ;   et al. | 2008-09-04 |
Scanning Field Emission Display App 20080211380 - Kim; Ho Seob ;   et al. | 2008-09-04 |
Micro-Column With Simple Structure App 20080203881 - Kim; Ho Seob ;   et al. | 2008-08-28 |
Micro column electron beam apparatus formed in low temperature co-fired ceramic substrate Grant 7,394,071 - Kim , et al. July 1, 2 | 2008-07-01 |
Method for manufacturing a lens assembly of microcolumn and lens assembly of microcolumn manufactured by the same Grant 7,329,878 - Kim February 12, 2 | 2008-02-12 |
Method for manufacturing a lens assembly of microcolumn and lens assembly of microcolumn manufactured by the same App 20060255286 - Kim; Ho Seob | 2006-11-16 |
Wafer-scale microcolumn array using low temperature co-fired ceramic substrate App 20060131698 - Jeong; Jin Woo ;   et al. | 2006-06-22 |
Micro column electron beam apparatus formed in low temperature co-fired ceramic substrate App 20060131752 - Kim; Dae Jun ;   et al. | 2006-06-22 |
Extractor for an microcolumn, an alignment method for an extractor aperture to an electron emitter, and a measuring method and an alignment method using thereof App 20060071175 - Kim; Ho Seob ;   et al. | 2006-04-06 |
Integrated microcolumn and scanning probe microscope arrays Grant 6,369,385 - Muray , et al. April 9, 2 | 2002-04-09 |
Electrostatic alignment of a charged particle beam Grant 6,288,401 - Chang , et al. September 11, 2 | 2001-09-11 |
Precision alignment and assembly of microlenses and microcolumns Grant 6,281,508 - Lee , et al. August 28, 2 | 2001-08-28 |
T-shaped electron-beam microcolumn as a general purpose scanning electron microscope Grant 6,023,060 - Chang , et al. February 8, 2 | 2000-02-08 |