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Patent applications and USPTO patent grants for Kim; Gi-Youl.The latest application filed is for "gas-dispersing apparatus for multiple chemical materials".
Patent | Date |
---|---|
Gas-dispersing Apparatus For Multiple Chemical Materials App 20210172063 - TAN; HUAQIANG ;   et al. | 2021-06-10 |
Device And Method To Control The Uniformity Of A Gas Flow In A Cvd Or An Ald Reactor Or Of A Layer Grown Therein App 20180128647 - Kim; Gi Youl ;   et al. | 2018-05-10 |
Method for forming TiSiN thin film layer by using atomic layer deposition Grant 9,159,608 - Park , et al. October 13, 2 | 2015-10-13 |
METHOD FOR FORMING TiSiN THIN FILM LAYER BY USING ATOMIC LAYER DEPOSITION App 20150050806 - Park; Woong ;   et al. | 2015-02-19 |
Transient enhanced atomic layer deposition Grant 7,981,473 - Kim , et al. July 19, 2 | 2011-07-19 |
Transient enhanced atomic layer deposition App 20080131601 - Kim; Gi Youl ;   et al. | 2008-06-05 |
Systems and methods for improved gas delivery App 20040065256 - Kim, Gi Youl ;   et al. | 2004-04-08 |
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