Kim; Eokbong
Patent Applications and Registrations
Patent applications and USPTO patent grants for Kim; Eokbong.The latest application filed is for "extreme ultraviolet lithography apparatus".
- Kim; Eokbong - Hwaseong-si KR
| Patent | Date |
|---|---|
| Extreme ultraviolet lithography apparatus Grant 10,969,702 - Kim , et al. April 6, 2 | 2021-04-06 |
| Extreme Ultraviolet Lithography Apparatus App 20210003929 - KIM; Eokbong ; et al. | 2021-01-07 |
| Pattern inspection methods and methods of fabricating reticles using the same via directing charged particle beams through discharge layers Grant 10,103,071 - Kim , et al. October 16, 2 | 2018-10-16 |
| Pattern Inspection Methods And Methods Of Fabricating Reticles Using The Same App 20180130714 - KIM; Eokbong ; et al. | 2018-05-10 |
| Apparatus Generating Extreme Ultraviolet Light And Exposure System Including The Same App 20170031142 - KIM; Eokbong ; et al. | 2017-02-02 |
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