Kilpi; Vaino
Patent Applications and Registrations
Patent applications and USPTO patent grants for Kilpi; Vaino.The latest application filed is for "substrate processing apparatus and method".
- Kilpi; Vaino - Espoo FI
- Kilpi; Vaino - Masala FI
| Patent | Date |
|---|---|
| Sample protection Grant 11,414,758 - Kostamo , et al. August 16, 2 | 2022-08-16 |
| Substrate loading in an ALD reactor Grant 11,280,001 - Kilpi , et al. March 22, 2 | 2022-03-22 |
| Substrate Processing Apparatus And Method App 20210189560 - MALINEN; Timo ; et al. | 2021-06-24 |
| Substrate processing apparatus and method Grant 11,004,707 - Kilpi May 11, 2 | 2021-05-11 |
| Sample Protection App 20200308698 - KOSTAMO; Juhana ; et al. | 2020-10-01 |
| Deposition reactor with plasma source Grant 10,494,718 - Kilpi , et al. De | 2019-12-03 |
| Substrate Loading In An Ald Reactor App 20190048465 - Kilpi; Vaino ; et al. | 2019-02-14 |
| Substrate loading in an ALD reactor Grant 10,161,038 - Kilpi , et al. Dec | 2018-12-25 |
| Atomic Layer Deposition with Plasma Source App 20180099304 - Kilpi; Vaino ; et al. | 2018-04-12 |
| Atomic layer deposition with plasma source Grant 9,868,131 - Kilpi , et al. January 16, 2 | 2018-01-16 |
| Method and apparatus for forming a substrate web track in an atomic layer deposition reactor Grant 9,745,661 - Malinen , et al. August 29, 2 | 2017-08-29 |
| Forming A Substrate Web Track In An Atomic Layer Deposition Reactor App 20160138163 - Malinen; Timo ; et al. | 2016-05-19 |
| Atomic Layer Deposition with Plasma Source App 20150322569 - Kilpi; Vaino ; et al. | 2015-11-12 |
| Substrate Loading In An Ald Reactor App 20150299859 - KILPI; Vaino ; et al. | 2015-10-22 |
| Atomic layer deposition with plasma source Grant 9,095,869 - Kilpi , et al. August 4, 2 | 2015-08-04 |
| Deposition Reactor With Plasma Source App 20140087093 - Kilpi; Vaino ; et al. | 2014-03-27 |
| Atomic Layer Deposition with Plasma Source App 20140024223 - Kilpi; Vaino ; et al. | 2014-01-23 |
| Apparatus for growing thin films Grant 6,835,416 - Kilpi December 28, 2 | 2004-12-28 |
| Apparatus for growing thin films Grant 6,689,210 - Soininen , et al. February 10, 2 | 2004-02-10 |
| Apparatus for growing thin films App 20030140854 - Kilpi, Vaino | 2003-07-31 |
| Apparatus for growing thin films Grant 6,551,406 - Kilpi April 22, 2 | 2003-04-22 |
| Apparatus for growing thin films App 20020185060 - Soininen, Pekka T. ; et al. | 2002-12-12 |
| Apparatus for growing thin films Grant 6,447,607 - Soininen , et al. September 10, 2 | 2002-09-10 |
| Apparatus for growing thin films App 20010013312 - Soininen, Pekka T. ; et al. | 2001-08-16 |
| Apparatus for growing thin films App 20010014371 - Kilpi, Vaino | 2001-08-16 |
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