Kikukawa; Makoto

Patent Applications and Registrations

Patent applications and USPTO patent grants for Kikukawa; Makoto.The latest application filed is for "developer waste liquid regenerating apparatus and method".

Company Profile

0.6.9

Kikukawa; Makoto - Yokohama JP
Kikukawa, Makoto - Yokohama-shi JP
Kikukawa; Makoto - Fujinomiya JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Water-based resist stripping liquid management apparatus and water-based resist stripping liquid management method Grant 7,109,037 - Nakagawa , et al. September 19, 2	2006-09-19
Processing solution preparation and supply method and apparatus Grant 7,101,517 - Nakagawa , et al. September 5, 2	2006-09-05
Developer waste liquid regenerating apparatus and method Grant 6,875,359 - Ogawa , et al. April 5, 2	2005-04-05
Alkali-based treating liquid, treating liquid adjusting method and equipment, treating liquid supplying method and equipment Grant 6,752,545 - Nakagawa , et al. June 22, 2	2004-06-22
Developer waste liquid regenerating apparatus and method App 20040099602 - Ogawa, Shu ; et al.	2004-05-27
Resist stripping equipment App 20040011463 - Nakagawa, Toshimoto ; et al.	2004-01-22
Developer producing equipment and method Grant 6,623,183 - Nakagawa , et al. September 23, 2	2003-09-23
Regenerating apparatus and method for resist stripping waste liquids App 20030141246 - Ogawa, Shu ; et al.	2003-07-31
Processing solution preparation and supply method and apparatus App 20030136763 - Nakagawa, Toshimoto ; et al.	2003-07-24
Alkali-based treating liquid, treating liquid adjusting method and equipment, treating liquid supplying method and equipment App 20030096199 - Nakagawa, Toshimoto ; et al.	2003-05-22
Non-water-based resist stripping liquid management apparatus and non-water-based resist stripping liquid management method App 20020197079 - Nakagawa, Toshimoto ; et al.	2002-12-26
Water-based resist stripping liquid management apparatus and water-based resist stripping liquid management method App 20020197869 - Nakagawa, Toshimoto ; et al.	2002-12-26
Developer producing equipment and method App 20020146251 - Nakagawa, Toshimoto ; et al.	2002-10-10
Purified developer producing equipment and method App 20020136087 - Nakagawa, Toshimoto ; et al.	2002-09-26
Apparatus for treating surface of boards Grant 6,302,600 - Nagase , et al. October 16, 2	2001-10-16

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