loadpatents
Patent applications and USPTO patent grants for Kikuiri; Nobutaka.The latest application filed is for "optical system adjustment method of image acquisition apparatus".
Patent | Date |
---|---|
Multiple beam image acquisition apparatus and multiple beam image acquisition method Grant 10,777,384 - Kikuiri , et al. Sept | 2020-09-15 |
Optical System Adjustment Method Of Image Acquisition Apparatus App 20200203121 - OGASAWARA; Munehiro ;   et al. | 2020-06-25 |
Optical system adjustment method of image acquisition apparatus Grant 10,629,406 - Ogasawara , et al. | 2020-04-21 |
Inspection method and inspection apparatus Grant 10,572,995 - Inoue , et al. Feb | 2020-02-25 |
Inspection apparatus and inspection method Grant 10,504,219 - Tsuchiya , et al. Dec | 2019-12-10 |
Multiple Beam Image Acquisition Apparatus And Multiple Beam Image Acquisition Method App 20190195815 - KIKUIRI; Nobutaka ;   et al. | 2019-06-27 |
Pattern inspection method and pattern inspection apparatus Grant 10,281,415 - Inoue , et al. | 2019-05-07 |
Optical System Adjustment Method Of Image Acquisition Apparatus App 20190051487 - Ogasawara; Munehiro ;   et al. | 2019-02-14 |
Pattern inspection apparatus and pattern inspection method Grant 10,127,648 - Nukada , et al. November 13, 2 | 2018-11-13 |
Pattern inspection apparatus Grant 10,094,791 - Kikuiri October 9, 2 | 2018-10-09 |
Inspection Method And Inspection Apparatus App 20180232873 - Inoue; Hiromu ;   et al. | 2018-08-16 |
Mask inspection apparatus, mask evaluation method and mask evaluation system Grant 10,026,011 - Tsuchiya , et al. July 17, 2 | 2018-07-17 |
Inspection method, inspection apparatus, and inspection system Grant 9,922,415 - Inoue , et al. March 20, 2 | 2018-03-20 |
Pattern inspection apparatus Grant 9,869,650 - Kikuiri January 16, 2 | 2018-01-16 |
Measuring apparatus Grant 9,811,896 - Isomura , et al. November 7, 2 | 2017-11-07 |
Pattern Inspection Apparatus App 20170315069 - KIKUIRI; Nobutaka | 2017-11-02 |
Pattern Inspection Apparatus App 20170315070 - KIKUIRI; Nobutaka | 2017-11-02 |
Pattern inspection apparatus and pattern inspection method Grant 9,728,373 - Kikuiri , et al. August 8, 2 | 2017-08-08 |
Inspection apparatus and inspection apparatus system Grant 9,691,143 - Inoue , et al. June 27, 2 | 2017-06-27 |
Pattern Inspection Apparatus And Pattern Inspection Method App 20170178314 - NUKADA; Hideki ;   et al. | 2017-06-22 |
Measuring apparatus that generates positional deviation distribution of a pattern on a target object Grant 9,659,361 - Isomura , et al. May 23, 2 | 2017-05-23 |
Pattern Inspection Apparatus And Pattern Inspection Method App 20170125208 - KIKUIRI; Nobutaka ;   et al. | 2017-05-04 |
Pattern Inspection Method And Pattern Inspection Apparatus App 20170122890 - INOUE; Takafumi ;   et al. | 2017-05-04 |
Mask inspection apparatus and mask inspection method Grant 9,626,755 - Tsuchiya , et al. April 18, 2 | 2017-04-18 |
Inspection apparatus and inspection method Grant 9,575,010 - Ogawa , et al. February 21, 2 | 2017-02-21 |
Pattern inspection apparatus and pattern inspection method Grant 9,542,586 - Matsumoto , et al. January 10, 2 | 2017-01-10 |
Inspection apparatus and inspection method Grant 9,530,202 - Kikuiri December 27, 2 | 2016-12-27 |
Inspection Apparatus And Inspection Method App 20160370300 - OGAWA; Riki ;   et al. | 2016-12-22 |
Inspection Method, Inspection Apparatus, And Inspection System App 20160292839 - INOUE; Takafumi ;   et al. | 2016-10-06 |
Inspection Apparatus And Inspection Method App 20160203595 - Tsuchiya; Hideo ;   et al. | 2016-07-14 |
Inspection Method And Inspection Apparatus App 20160171674 - TSUCHIYA; Hideo ;   et al. | 2016-06-16 |
Mask Inspection Apparatus And Mask Inspection Method App 20160042505 - TSUCHIYA; Hideo ;   et al. | 2016-02-11 |
Inspection system and method Grant 9,235,883 - Inoue , et al. January 12, 2 | 2016-01-12 |
Mask Inspection Apparatus, Mask Evaluation Method And Mask Evaluation System App 20150379707 - TSUCHIYA; Hideo ;   et al. | 2015-12-31 |
Inspection sensitivity evaluation method Grant 9,196,033 - Hashimoto , et al. November 24, 2 | 2015-11-24 |
Inspection method Grant 9,165,355 - Tsuchiya , et al. October 20, 2 | 2015-10-20 |
Inspection Method App 20150279024 - TSUCHIYA; Hideo ;   et al. | 2015-10-01 |
Inspection method and system Grant 9,116,136 - Inoue , et al. August 25, 2 | 2015-08-25 |
Inspection Apparatus And Inspection Method App 20150213587 - KIKUIRI; Nobutaka | 2015-07-30 |
Pattern evaluation method and apparatus Grant 9,086,388 - Ogawa , et al. July 21, 2 | 2015-07-21 |
Inspection apparatus and method Grant 9,057,711 - Tsuchiya , et al. June 16, 2 | 2015-06-16 |
Measuring Apparatus App 20150125066 - ISOMURA; Ikunao ;   et al. | 2015-05-07 |
Measuring Apparatus App 20150125067 - ISOMURA; Ikunao ;   et al. | 2015-05-07 |
Inspection Sensitivity Evaluation Method App 20140348414 - HASHIMOTO; Hideaki ;   et al. | 2014-11-27 |
Inspection Apparatus App 20140320860 - TAYA; Makoto ;   et al. | 2014-10-30 |
Inspection system and method Grant 8,861,832 - Inoue , et al. October 14, 2 | 2014-10-14 |
Inspection Apparatus And Inspection Apparatus System App 20140104412 - INOUE; Hiromu ;   et al. | 2014-04-17 |
Pattern Evaluation Method And Apparatus App 20140072202 - OGAWA; Riki ;   et al. | 2014-03-13 |
Inspection Method And System App 20140002826 - Inoue; Hiromu ;   et al. | 2014-01-02 |
Inspection System And Method App 20130250095 - INOUE; Takafumi ;   et al. | 2013-09-26 |
Inspection System And Method App 20130216120 - INOUE; Takafumi ;   et al. | 2013-08-22 |
Pattern inspection apparatus and pattern inspection method Grant 8,442,320 - Isomura , et al. May 14, 2 | 2013-05-14 |
Pattern Inspection Apparatus And Pattern Inspection Method App 20130044205 - Matsumoto; Eiji ;   et al. | 2013-02-21 |
Ultrafine lithography pattern inspection using multi-stage TDI image sensors with false image removability Grant 8,254,663 - Kataoka , et al. August 28, 2 | 2012-08-28 |
Inspection Apparatus And Method App 20120140060 - TSUCHIYA; Hideo ;   et al. | 2012-06-07 |
Pattern Inspection Apparatus And Pattern Inspection Method App 20110229009 - ISOMURA; Ikunao ;   et al. | 2011-09-22 |
Xy Stage Apparatus App 20100073684 - KOBAYASHI; Noboru ;   et al. | 2010-03-25 |
Fuel cell system with a fuel tank configured to store a fuel at a pressure higher than atmospheric pressure Grant 7,678,481 - Sato , et al. March 16, 2 | 2010-03-16 |
Fuel cell system with a gas supply pump that applies negative pressure to the anode and cathode Grant 7,597,982 - Sakaue , et al. October 6, 2 | 2009-10-06 |
Ultrafine Lithography Pattern Inspection Using Multi-stage Tdi Image Sensors With False Image Removability App 20090238446 - Kataoka; Akira ;   et al. | 2009-09-24 |
Active Camera Apparatus And Robot Apparatus App 20090028542 - NAKAMOTO; Hideichi ;   et al. | 2009-01-29 |
Active camera apparatus and robot apparatus Grant 7,446,813 - Nakamoto , et al. November 4, 2 | 2008-11-04 |
Fuel cell system Grant 7,264,897 - Sato , et al. September 4, 2 | 2007-09-04 |
Monitoring apparatus Grant 7,225,111 - Suzuki , et al. May 29, 2 | 2007-05-29 |
Fuel cell system App 20070111056 - Sato; Yuusuke ;   et al. | 2007-05-17 |
Electronic equipment and fuel cell for the same Grant 7,104,114 - Hisano , et al. September 12, 2 | 2006-09-12 |
Monitoring apparatus App 20050192778 - Suzuki, Kaoru ;   et al. | 2005-09-01 |
Monitoring apparatus Grant 6,907,388 - Suzuki , et al. June 14, 2 | 2005-06-14 |
Active camera apparatus and robot apparatus App 20050018074 - Nakamoto, Hideichi ;   et al. | 2005-01-27 |
Fuel cell system App 20050008907 - Isozaki, Yoshiyuki ;   et al. | 2005-01-13 |
Electronic equipment and fuel cell for the same App 20040161642 - Hisano, Katsumi ;   et al. | 2004-08-19 |
Fuel cell system App 20040062960 - Sakaue, Eiichi ;   et al. | 2004-04-01 |
Fuel cell system App 20040062961 - Sato, Yuusuke ;   et al. | 2004-04-01 |
Monitoring apparatus App 20030229474 - Suzuki, Kaoru ;   et al. | 2003-12-11 |
Table moving apparatus Grant 5,323,712 - Kikuiri June 28, 1 | 1994-06-28 |
Method and apparatus for setting the gap distance between a mask and a wafer at a predetermined distance Grant 5,179,863 - Uchida , et al. January 19, 1 | 1993-01-19 |
Synchrotron radiation apparatus Grant 5,134,640 - Hirokawa , et al. July 28, 1 | 1992-07-28 |
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