KIKUCHI; Akiou

Patent Applications and Registrations

Patent applications and USPTO patent grants for KIKUCHI; Akiou.The latest application filed is for "method for producing tungsten hexafluoride".

Company Profile

1.21.28

KIKUCHI; Akiou - Ube-shi Yamaguchi
Kikuchi; Akiou - Ube JP
Kikuchi; Akiou - Yamaguchi JP
KIKUCHI; Akiou - Ube City JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method for Producing Tungsten Hexafluoride App 20210253442 - KIKUCHI; Akiou ; et al.	2021-08-19
Tungsten Hexafluoride Production Method App 20200247685 - Kind Code	2020-08-06
Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus, and a non-transitory computer-readable recording medium Grant 10,156,012 - Kameda , et al. Dec	2018-12-18
Method for removing adhering matter and dry etching method Grant 10,153,153 - Kikuchi , et al. Dec	2018-12-11
Thermoelectric Conversion Material And Method For Producing Same App 20180212131 - KIKUCHI; Akiou ; et al.	2018-07-26
Cleaning Method, Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And A Non-transitory Computer-readable Recording Medium App 20180057936 - KAMEDA; Kenji ; et al.	2018-03-01
Sacrificial-film removal method and substrate processing device Grant 9,852,914 - Okutani , et al. December 26, 2	2017-12-26
Dry etching method Grant 9,728,422 - Oomori , et al. August 8, 2	2017-08-08
Gas generation device Grant 9,708,720 - Yao , et al. July 18, 2	2017-07-18
Method For Removing Adhering Matter And Dry Etching Method App 20170200602 - KIKUCHI; Akiou ; et al.	2017-07-13
IF.sub.7-derived iodine fluoride compound recovery method and recovery device Grant 9,676,626 - Kikuchi , et al. June 13, 2	2017-06-13
Silicon dry etching method Grant 9,524,877 - Kikuchi , et al. December 20, 2	2016-12-20
Sacrificial-film Removal Method And Substrate Processing Device App 20160254162 - Okutani; Manabu ; et al.	2016-09-01
Dry Etching Method App 20160218015 - OOMORI; Hiroyuki ; et al.	2016-07-28
Method for synthesizing fluorine compound by electrolysis and electrode therefor Grant 9,238,872 - Mori , et al. January 19, 2	2016-01-19
Cleaning Gas and Cleaning Method App 20160002574 - OOMORI; Hiroyuki ; et al.	2016-01-07
Silicon Dry Etching Method App 20160005612 - KIKUCHI; Akiou ; et al.	2016-01-07
Dry etching agent and dry etching method using the same Grant 9,230,821 - Hibino , et al. January 5, 2	2016-01-05
Gas Generation Device App 20150292092 - Yao; Akifumi ; et al.	2015-10-15
Method and device for measuring water content in hydrogen fluoride-containing fluoride salt compounds Grant 9,097,688 - Kikuchi , et al. August 4, 2	2015-08-04
Dry etching agent and dry etching method using the same Grant 9,093,388 - Hibino , et al. July 28, 2	2015-07-28
Pattern forming method Grant 9,082,725 - Kimura , et al. July 14, 2	2015-07-14
Dry etching agent and dry etching method Grant 9,017,571 - Umezaki , et al. April 28, 2	2015-04-28
If7-derived Iodine Fluoride Compound Recovery Method And Recovery Device App 20150037242 - KIKUCHI; Akiou ; et al.	2015-02-05
Dry Etching Method, Dry Etching Apparatus, Metal Film, And Device Including The Metal Film App 20140352716 - KIKUCHI; Akiou ; et al.	2014-12-04
Fluorine gas generating apparatus Grant 8,864,961 - Kikuchi , et al. October 21, 2	2014-10-21
Dry Etching Agent App 20140302683 - Kikuchi; Akiou ; et al.	2014-10-09
Dry Etching Agent and Dry Etching Method Using the Same App 20140242803 - HIBINO; Yasuo ; et al.	2014-08-28
Pattern Forming Method App 20140199852 - Kimura; Masahiro ; et al.	2014-07-17
Method for Synthesizing Fluorine Compound by Electrolysis and Electrode Therefor App 20130341202 - Mori; Isamu ; et al.	2013-12-26
Dry Etching Agent and Dry Etching Method App 20130105728 - Umezaki; Tomonori ; et al.	2013-05-02
Fluorine Gas Generating Apparatus App 20130008781 - Kikuchi; Akiou ; et al.	2013-01-10
Method and Device for Measuring Water Content in Hydrogen Fluoride-Containing Compound App 20120322158 - Kikuchi; Akiou ; et al.	2012-12-20
Dry Etching Agent and Dry Etching Method Using the Same App 20120298911 - Hibino; Yasuo ; et al.	2012-11-29
Method for producing oxygen-containing halogenated fluoride Grant 8,105,566 - Mori , et al. January 31, 2	2012-01-31
System for In-Situ Mixing and Diluting Fluorine Gas App 20120006487 - Kikuchi; Akiou ; et al.	2012-01-12
Method for Manufacturing Oxygen-Containing Halogenated Fluoride App 20110150747 - Kikuchi; Akiou ; et al.	2011-06-23
Method for Producing Oxygen-Containing Halogenated Fluoride App 20110008242 - Mori; Isamu ; et al.	2011-01-13
Method for Removal of CIO3F App 20100247412 - Kikuchi; Akiou ; et al.	2010-09-30

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