Kiers; Antoine Gaston Marie

Patent Applications and Registrations

Patent applications and USPTO patent grants for Kiers; Antoine Gaston Marie.The latest application filed is for "method of measuring variation, inspection system, computer program, and computer system".

Company Profile

4.38.36

Kiers; Antoine Gaston Marie - Veldhoven NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Deep learning for semantic segmentation of pattern Grant 11,379,970 - Koopman , et al. July 5, 2	2022-07-05
Method Of Measuring Variation, Inspection System, Computer Program, And Computer System App 20220011680 - KIERS; Antoine Gaston Marie ; et al.	2022-01-13
Method In The Manufacturing Process Of A Device, A Non-transitory Computer-readable Medium And A System Configured To Perform The Method App 20210407112 - TEL; Wim Tjibbo ; et al.	2021-12-30
Deep Learning For Semantic Segmentation Of Pattern App 20210374936 - KOOPMAN; Adrianus Cornelis Matheus ; et al.	2021-12-02
Method of measuring variation, inspection system, computer program, and computer system Grant 11,131,936 - Kiers , et al. September 28, 2	2021-09-28
Method and Apparatus for Angular-Resolved Spectroscopic Lithography Characterization App 20210208083 - DEN BOEF; Arie Jeffrey ; et al.	2021-07-08
Method and apparatus for angular-resolved spectroscopic lithography characterization Grant 10,955,353 - Den Boef , et al. March 23, 2	2021-03-23
Method Of Measuring Variation, Inspection System, Computer Program, And Computer System App 20190391500 - KIERS; Antoine Gaston Marie ; et al.	2019-12-26
Method and Apparatus for Angular-Resolved Spectroscopic Lithography Characterization App 20190170657 - DEN BOEF; Arie Jeffrey Maria ; et al.	2019-06-06
Method and apparatus for angular-resolved spectroscopic lithography characterization Grant 10,241,055 - Den Boef , et al.	2019-03-26
Method to determine the usefulness of alignment marks to correct overlay, and a combination of a lithographic apparatus and an overlay measurement system Grant 9,454,084 - Lyulina , et al. September 27, 2	2016-09-27
Method of determining focus corrections, lithographic processing cell and device manufacturing method Grant 9,360,769 - Kisteman , et al. June 7, 2	2016-06-07
Method of determining focus corrections, lithographic processing cell and device manufacturing method Grant 9,360,770 - Kisteman , et al. June 7, 2	2016-06-07
Inspection apparatus, lithographic apparatus, lithographic processing cell and inspection method Grant 9,128,065 - Cramer , et al. September 8, 2	2015-09-08
Method To Determine The Usefulness Of Alignment Marks To Correct Overlay, And A Combination Of A Lithographic Apparatus And An Overlay Measurement System App 20150146188 - Lyulina; Irina ; et al.	2015-05-28
Method of Determining Focus Corrections, Lithographic Processing Cell and Device Manufacturing Method App 20150085267 - KISTEMAN; Arend Johannes ; et al.	2015-03-26
Method and Apparatus for Angular-Resolved Spectroscopic Lithography Characterization App 20140233025 - DEN BOEF; Arie Jeffrey Maria ; et al.	2014-08-21
Inspection Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Inspection Method App 20140211185 - Cramer; Hugo Augustinus Joseph ; et al.	2014-07-31
Method to determine the value of process parameters based on scatterometry data Grant 8,773,657 - Van Der Laan , et al. July 8, 2	2014-07-08
Method and apparatus for angular-resolved spectroscopic lithography characterization Grant 8,760,662 - Den Boef , et al. June 24, 2	2014-06-24
Inspection apparatus for lithography Grant 8,724,087 - Van De Kerkhof , et al. May 13, 2	2014-05-13
Inspection apparatus, lithographic apparatus, lithographic processing cell and inspection method Grant 8,705,007 - Cramer , et al. April 22, 2	2014-04-22
Method of measuring a characteristic Grant 8,685,626 - Quaedackers , et al. April 1, 2	2014-04-01
Method and Apparatus for Angular-Resolved Spectroscopic Lithography Characterization App 20140055788 - DEN BOEF; Arie Jeffrey Maria ; et al.	2014-02-27
Method and apparatus for angular-resolved spectroscopic lithography characterization Grant 8,553,230 - Den Boef , et al. October 8, 2	2013-10-08
Method of Determining Focus Corrections, Lithographic Processing Cell and Device Manufacturing Method App 20130050668 - Kisteman; Arend Johannes ; et al.	2013-02-28
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method Grant 8,294,907 - Cramer , et al. October 23, 2	2012-10-23
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method Grant 8,233,155 - Kiers , et al. July 31, 2	2012-07-31
Method and Apparatus for Angular-Resolved Spectroscopic Lithography Characterization App 20120038929 - Den Boef; Arie Jeffrey Maria ; et al.	2012-02-16
Method and apparatus for angular-resolved spectroscopic lithography characterization Grant 8,054,467 - Den Boef , et al. November 8, 2	2011-11-08
Inspection Apparatus for Lithography App 20110141444 - Van De Kerkhof; Marcus Adrianus ; et al.	2011-06-16
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method Grant 7,916,927 - Cramer , et al. March 29, 2	2011-03-29
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method Grant 7,911,612 - Kiers , et al. March 22, 2	2011-03-22
Method and apparatus for angular-resolved spectroscopic lithography characterization App 20110007314 - Den Boef; Arie Jeffrey Maria ; et al.	2011-01-13
Method of Measuring a Characteristic App 20100227280 - Quaedackers; Johannes Anna ; et al.	2010-09-09
Method and apparatus for angular-resolved spectroscopic lithography characterization Grant 7,791,732 - Den Boef , et al. September 7, 2	2010-09-07
Method and apparatus for angular-resolved spectroscopic lithography characterization Grant 7,791,727 - Den Boef , et al. September 7, 2	2010-09-07
Inspection Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Inspection Method App 20100201963 - Cramer; Hugo Augustinus Joseph ; et al.	2010-08-12
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method Grant 7,715,019 - Kiers , et al. May 11, 2	2010-05-11
Method and apparatus for angular-resolved spectroscopic lithography characterization Grant 7,692,792 - Kiers , et al. April 6, 2	2010-04-06
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method Grant 7,630,087 - Verstappen , et al. December 8, 2	2009-12-08
Method of forming a substrate for use in calibrating a metrology tool, calibration substrate and metrology tool calibration method Grant 7,605,907 - Cramer , et al. October 20, 2	2009-10-20
Device manufacturing method and computer program product Grant 7,596,420 - Kiers , et al. September 29, 2	2009-09-29
Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method App 20090237676 - KIERS; Antoine Gaston Marie ; et al.	2009-09-24
Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method for Determining A Parameter of a Target Pattern App 20090135424 - Kiers; Antoine Gaston Marie ; et al.	2009-05-28
Focus determination method, device manufacturing method, and mask Grant 7,532,307 - Van Der Schaar , et al. May 12, 2	2009-05-12
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method Grant 7,532,331 - Kiers , et al. May 12, 2	2009-05-12
Method for predicting a critical dimension of a feature imaged by a lithographic apparatus Grant 7,443,486 - Van Ingen Schenau , et al. October 28, 2	2008-10-28
Method of forming a substrate for use in calibrating a metrology tool, calibration substrate and metrology tool calibration method App 20080239277 - Cramer; Hugo Augustinus Joseph ; et al.	2008-10-02
Inspection method and apparatus,lithographic apparatus, lithographic processing cell and device manufacturing method App 20080170780 - Cramer; Hugo Augustinus Joseph ; et al.	2008-07-17
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method App 20080117434 - Verstappen; Leonardus Henricus, Marie ; et al.	2008-05-22
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method App 20080088832 - Cramer; Hugo Angustinus Joseph ; et al.	2008-04-17
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method App 20080068616 - Kiers; Antoine Gaston Marie ; et al.	2008-03-20
Method and apparatus for angular-resolved spectroscopic lithography characterization App 20070296973 - Kiers; Antoine Gaston Marie ; et al.	2007-12-27
Test pattern, inspection method, and device manufacturing method Grant 7,312,860 - Den Boef , et al. December 25, 2	2007-12-25
Device manufacturing method and computer program product App 20070293973 - Kiers; Antoine Gaston Marie ; et al.	2007-12-20
Method to Determine the Value of Process Parameters BAsed on Scatterometry Data App 20070222979 - Van Der Laan; Hans ; et al.	2007-09-27
Test pattern, inspection method, and device manufacturing method App 20070052948 - Den Boef; Arie Jeffrey ; et al.	2007-03-08
Test pattern, inspection method, and device manufacturing method Grant 7,151,594 - Den Boef , et al. December 19, 2	2006-12-19
Device inspection method and apparatus using an asymmetric marker Grant 7,112,813 - Den Boef , et al. September 26, 2	2006-09-26
Lithography measurements using scatterometry App 20060192936 - Schenau; Koen Van Ingen ; et al.	2006-08-31
Latent overlay metrology App 20060139592 - Den Boef; Arie Jeffrey ; et al.	2006-06-29
Latent overlay metrology App 20060109463 - Boef; Arie Jeffrey Den ; et al.	2006-05-25
Method and apparatus for angular-resolved spectroscopic lithography characterization App 20060066855 - Boef; Arie Jeffrey Maria Den ; et al.	2006-03-30
Method to determine the value of process parameters based on scatterometry data App 20050185174 - Laan, Hans Van Der ; et al.	2005-08-25
Device inspection App 20040129900 - Den Boef, Arie Jeffrey ; et al.	2004-07-08
Test pattern, inspection method, and device manufacturing method App 20040114132 - Den Boef, Arie Jeffrey ; et al.	2004-06-17

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