Kienzle; Oliver

Patent Applications and Registrations

Patent applications and USPTO patent grants for Kienzle; Oliver.The latest application filed is for "particle-optical systems and arrangements and particle-optical components for such systems and arrangements".

Company Profile

1.20.19

Kienzle; Oliver - Jena DE
Kienzle; Oliver - Jenna DE
Kienzle; Oliver - Aalen DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements Grant 10,504,681 - Knippelmeyer , et al. Dec	2019-12-10
Particle-optical Systems And Arrangements And Particle-optical Components For Such Systems And Arrangements App 20170287674 - KNIPPELMEYER; Rainer ; et al.	2017-10-05
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements Grant 9,673,024 - Knippelmeyer , et al. June 6, 2	2017-06-06
Particle-optical Systems And Arrangements And Particle-optical Components For Such Systems And Arrangements App 20160111251 - KNIPPELMEYER; Rainer ; et al.	2016-04-21
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements Grant 9,224,576 - Knippelmeyer , et al. December 29, 2	2015-12-29
Particle-Optical Systems and Arrangements and Particle-Optical Components for such Systems and Arrangements App 20140158902 - Knippelmeyer; Rainer ; et al.	2014-06-12
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements Grant 8,637,834 - Knippelmeyer , et al. January 28, 2	2014-01-28
Method for repairing phase shift masks Grant 8,268,516 - Zibold , et al. September 18, 2	2012-09-18
Method and apparatus for analyzing a group of photolithographic masks Grant 8,264,535 - Kienzle , et al. September 11, 2	2012-09-11
Particle-Optical Systems and Arrangements and Particle-Optical Components for such Systems and Arrangements App 20120104252 - KNIPPELMEYER; Rainer ; et al.	2012-05-03
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements Grant 8,097,847 - Knippelmeyer , et al. January 17, 2	2012-01-17
Method and arrangement for repairing photolithography masks Grant 7,916,930 - Zibold , et al. March 29, 2	2011-03-29
Method For Repairing Phase Shift Masks App 20100266937 - Zibold; Axel ; et al.	2010-10-21
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements App 20100181479 - Knippelmeyer; Rainer ; et al.	2010-07-22
Method And Apparatus For Analyzing A Group Of Photolithographic Masks App 20100157046 - Kienzle; Oliver ; et al.	2010-06-24
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements Grant 7,554,094 - Knippelmeyer , et al. June 30, 2	2009-06-30
Method and apparatus for the repair of photolithography masks App 20080069431 - Zibold; Axel ; et al.	2008-03-20
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements App 20080054184 - Knippelmeyer; Rainer ; et al.	2008-03-06
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements Grant 7,244,949 - Knippelmeyer , et al. July 17, 2	2007-07-17
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements App 20060289804 - Knippelmeyer; Rainer ; et al.	2006-12-28
Beam guiding arrangement, imaging method, electron microscopy system and electron lithography system Grant 7,135,677 - Kienzle , et al. November 14, 2	2006-11-14
Apparatus and method for exposing a radiation sensitive layer by means of charged particles as well as a mask for this purpose Grant 7,015,487 - Kienzle , et al. March 21, 2	2006-03-21
Method for the electron-microscopic observation of a semiconductor arrangement and apparatus therefor Grant 6,967,328 - Kienzle , et al. November 22, 2	2005-11-22
Electron microscopy system Grant 6,946,657 - Kienzle , et al. September 20, 2	2005-09-20
Particle-optical apparatus, electron microscopy system and electron lithography system Grant 6,914,249 - Kienzle , et al. July 5, 2	2005-07-05
Examining system for the particle-optical imaging of an object, deflector for charged particles as well as method for the operation of the same Grant 6,903,337 - Kienzle , et al. June 7, 2	2005-06-07
Applications operating with beams of charged particles Grant 6,878,936 - Kienzle , et al. April 12, 2	2005-04-12
Particle-optical apparatus, illumination apparatus and projection system as well as a method employing the same Grant 6,756,599 - Kienzle June 29, 2	2004-06-29
Electron microscopy system App 20040108457 - Kienzle, Oliver ; et al.	2004-06-10
Particle-optical apparatus, electron microscopy system and electron lithography system App 20040105160 - Kienzle, Oliver ; et al.	2004-06-03
Beam guiding arrangement, imaging method, electron microscopy system and electron lithography system App 20040084621 - Kienzle, Oliver ; et al.	2004-05-06
Method for the electron-microscopic observation of a semiconductor arrangement and apparatus therefor App 20040065827 - Kienzle, Oliver ; et al.	2004-04-08
Applications operating with beams of charged particles App 20040056193 - Kienzle, Oliver ; et al.	2004-03-25
Particle-optical component and system comprising a particle-optical component Grant 6,642,525 - Kienzle , et al. November 4, 2	2003-11-04
Examining system for the particle-optical imaging of an object, deflector for charged particles as well as method for the operation of the same App 20030066961 - Kienzle, Oliver ; et al.	2003-04-10
Particle-optical apparatus, illumination apparatus and projection system as well as a method employing the same App 20020179845 - Kienzle, Oliver	2002-12-05
Particle-optical component and system comprising a particle-optical component App 20020084422 - Kienzle, Oliver ; et al.	2002-07-04
Apparatus and method for exposing a radiation sensitive layer by means of charged particles as well as a mask for this purpose App 20020071996 - Kienzle, Oliver ; et al.	2002-06-13

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