Patent | Date |
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Method for processing substrate and method for fabricating apparatus Grant 9,419,105 - Kido August 16, 2 | 2016-08-16 |
Apparatus for processing substrate and method of doing the same Grant 8,663,488 - Kido March 4, 2 | 2014-03-04 |
Method For Processing Substrate And Method For Fabricating Apparatus App 20140004667 - KIDO; Shusaku | 2014-01-02 |
Apparatus For Processing Substrate And Method Of Doing The Same App 20120325776 - KIDO; Shusaku | 2012-12-27 |
Apparatus for processing substrate and method of doing the same Grant 8,293,128 - Kido October 23, 2 | 2012-10-23 |
Apparatus For Processing Substrate And Method Of Doing The Same App 20110229831 - KIDO; Shusaku | 2011-09-22 |
Chemical Solution For Selectively Treating Or Removing A Deteriorated Layer At A Surface Of An Organic Film, And Method For Using Such App 20100327218 - KIDO; Shusaku | 2010-12-30 |
Method for forming organic mask and method for forming pattern using said organic mask Grant 7,807,341 - Kido October 5, 2 | 2010-10-05 |
Apparatus For Processing Substrate And Method Of Doing The Same App 20090314741 - KIDO; Shusaku | 2009-12-24 |
Substrate processing system for performing exposure process in gas atmosphere App 20090263974 - Kido; Shusaku ;   et al. | 2009-10-22 |
Semiconductor device having a gap between a gate electrode and a dummy gate electrode Grant 7,554,164 - Kido June 30, 2 | 2009-06-30 |
Apparatus For Processing Substrate And Method Of Doing The Same App 20090135381 - KIDO; Shusaku | 2009-05-28 |
Method For Etching And For Forming A Contact Hole Using Thereof App 20080283496 - KIDO; Shusaku | 2008-11-20 |
Method Of Fabricating Light-reflector In Liquid Crystal Display Device App 20080266489 - SAKURAI; Hiroshi ;   et al. | 2008-10-30 |
Method Of Processing Substrate And Chemical Used In The Same App 20080145798 - KIDO; Shusaku | 2008-06-19 |
Method Of Processing Substrate And Chemical Used In The Same App 20080146801 - KIDO; Shusaku | 2008-06-19 |
Substrate processing system for performing exposure process in gas atmosphere App 20080121173 - Kido; Shusaku ;   et al. | 2008-05-29 |
Method for etching and for forming a contact hole using thereof Grant 7,338,911 - Kido March 4, 2 | 2008-03-04 |
Apparatus For Processing Substrate And Method Of Doing The Same App 20070272355 - KIDO; Shusaku | 2007-11-29 |
Method of processing substrate App 20070224547 - Kido; Shusaku | 2007-09-27 |
Process for forming pattern and method for producing liquid crystal display apparatus Grant 7,226,865 - Kido June 5, 2 | 2007-06-05 |
Method for removing patterned layer from lower layer through reflow Grant 7,214,473 - Kido May 8, 2 | 2007-05-08 |
Method of processing substrate and chemical used in the same App 20060273071 - Kido; Shusaku | 2006-12-07 |
Substrate processing system for performing exposure process in gas atmosphere App 20060157199 - Kido; Shusaku ;   et al. | 2006-07-20 |
Method for etching and for forming a contact hole using thereof App 20060141789 - Kido; Shusaku | 2006-06-29 |
Substrate processing system for performing exposure process in gas atmosphere App 20060130759 - Kido; Shusaku ;   et al. | 2006-06-22 |
Method of deforming a pattern and semiconductor device formed by utilizing deformed pattern Grant 7,060,623 - Kido June 13, 2 | 2006-06-13 |
Method of forming a deformed pattern over a substrate App 20060115924 - Kido; Shusaku | 2006-06-01 |
Substrate processing system for performing exposure process in gas atmosphere App 20060090853 - Kido; Shusaku ;   et al. | 2006-05-04 |
Method of processing substrate and chemical used in the same App 20060093968 - Kido; Shusaku | 2006-05-04 |
Method of processing substrate and chemical used in the same App 20060093969 - Kido; Shusaku | 2006-05-04 |
Substrate processing system for performing exposure process in gas atmosphere App 20060090852 - Kido; Shusaku ;   et al. | 2006-05-04 |
Process for forming pattern and method for producing liquid crystal display apparatus Grant 7,033,951 - Kido April 25, 2 | 2006-04-25 |
Method of deforming a pattern and semiconductor device formed by utilizing deformed pattern Grant 7,030,467 - Kido April 18, 2 | 2006-04-18 |
Substrate processing system for performing exposure process in gas atmosphere App 20060070702 - Kido; Shusaku ;   et al. | 2006-04-06 |
Process for forming pattern and method for producing liquid crystal display apparatus App 20060060560 - Kido; Shusaku | 2006-03-23 |
Method of deforming a pattern and semiconductor device formed by utilizing deformed pattern Grant 6,977,422 - Kido December 20, 2 | 2005-12-20 |
Semiconductor device having a gap between a gate electrode and a dummy gate electrode App 20050258420 - Kido, Shusaku | 2005-11-24 |
Method for forming organic mask and method for forming pattern using said organic mask App 20050230348 - Kido, Shusaku | 2005-10-20 |
Method of deforming a pattern and semiconductor device formed by utilizing deformed pattern Grant 6,953,976 - Kido October 11, 2 | 2005-10-11 |
Method of deforming a pattern and semiconductor device formed by utilizing deformed pattern Grant 6,949,766 - Kido September 27, 2 | 2005-09-27 |
Active matrix substrate plate and manufacturing method therefor Grant 6,890,783 - Kimura , et al. May 10, 2 | 2005-05-10 |
Apparatus for processing substrate and method of doing the same App 20050087301 - Kido, Shusaku | 2005-04-28 |
Method of processing substrate and chemical used in the same App 20050061439 - Kido, Shusaku | 2005-03-24 |
Apparatus for processing substrate and method of doing the same App 20050062952 - Kido, Shusaku | 2005-03-24 |
Method of processing substrate and chemical used in the same App 20050064614 - Kido, Shusaku | 2005-03-24 |
Semiconductor device formed by utilizing deformed pattern Grant 6,791,145 - Kido September 14, 2 | 2004-09-14 |
Method of deforming a pattern and semiconductor device formed by utilizing deformed pattern App 20040161864 - Kido, Shusaku | 2004-08-19 |
Method of deforming a pattern and semiconductor device formed by utilizing deformed pattern App 20040159914 - Kido, Shusaku | 2004-08-19 |
Method Of Deforming A Pattern And Semiconductor Device Formed By Utilizing Deformed Pattern App 20040159890 - Kido, Shusaku | 2004-08-19 |
Method of deforming a pattern and semiconductor device formed by utilizing deformed pattern App 20040159838 - Kido, Shusaku | 2004-08-19 |
Method for removing patterned layer from lower layer through reflow App 20040157171 - Kido, Shusaku | 2004-08-12 |
Process for forming pattern and method for producing liquid crystal apparatus employing process for forming pattern Grant 6,767,694 - Kido July 27, 2 | 2004-07-27 |
Method for removing patterned layer from lower layer through reflow Grant 6,756,187 - Kido June 29, 2 | 2004-06-29 |
Manufacturing method of active matrix substrate Grant 6,740,596 - Hayase , et al. May 25, 2 | 2004-05-25 |
Method of deforming a pattern and semiconductor device formed by utilizing deformed pattern Grant 6,707,107 - Kido March 16, 2 | 2004-03-16 |
Pattern forming method and method of manufacturing thin film transistor Grant 6,670,104 - Kido December 30, 2 | 2003-12-30 |
Manufacturing method of active matrix substrate plate and manufacturing method therefor Grant 6,632,696 - Kimura , et al. October 14, 2 | 2003-10-14 |
Pattern forming method for flattening an organic film for a liquid crystal display device Grant 6,617,263 - Kido September 9, 2 | 2003-09-09 |
Method for removing patterned layer from lower layer through reflow App 20030129548 - Kido, Shusaku | 2003-07-10 |
Method of deforming a pattern and semiconductor device formed by utilizing deformed pattern App 20030071236 - Kido, Shusaku | 2003-04-17 |
Substrate processing system for performing exposure process in gas atmosphere App 20030041971 - Kido, Shusaku ;   et al. | 2003-03-06 |
Pattern forming method and method for manufacturing liquid crystal display device using the same App 20030012869 - Kido, Shusaku | 2003-01-16 |
Active matrix substrate plate and manufacturing method therefor App 20030013221 - Kimura, Shigeru ;   et al. | 2003-01-16 |
Method of deforming a pattern and semiconductor device formed by utilizing deformed pattern App 20020187573 - Kido, Shusaku | 2002-12-12 |
Process for forming pattern and method for producing liquid crystal display apparatus employing process for forming pattern App 20020123241 - Kido, Shusaku | 2002-09-05 |
Process for forming pattern and method for producing liquid crystal display apparatus App 20020119586 - Kido, Shusaku | 2002-08-29 |
Pattern formation method and method of manufacturing display using it Grant 6,380,006 - Kido April 30, 2 | 2002-04-30 |
Manufacturing method of active matrix substrate App 20020009890 - Hayase, Takasuke ;   et al. | 2002-01-24 |
Method of deforming a pattern and semiconductor device formed by utilizing deformed pattern App 20020000557 - Kido, Shusaku | 2002-01-03 |
Pattern forming method and method of manufacturing thin film transistor App 20020001777 - Kido, Shusaku | 2002-01-03 |
Pattern formation method and method of manufacturing display using it App 20010053570 - Kido, Shusaku | 2001-12-20 |
Active matrix substrate plate and manufacturing method therefor App 20010010370 - Kimura, Shigeru ;   et al. | 2001-08-02 |