Patent | Date |
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Exposure condition determination method, exposure method, exposure apparatus, and device manufacturing method involving detection of the situation of a liquid immersion region App 20160124317 - Kida; Yoshiki ;   et al. | 2016-05-05 |
Exposure condition determination method, exposure method, exposure apparatus, and device manufacturing method involving detection of the situation of a liquid immersion region Grant 9,239,524 - Kida , et al. January 19, 2 | 2016-01-19 |
Exposure apparatus adjusting method, exposure apparatus, and device fabricating method Grant 9,025,126 - Shirata , et al. May 5, 2 | 2015-05-05 |
Exposure apparatus, exposure method, and device producing method Grant 8,913,224 - Kida December 16, 2 | 2014-12-16 |
Exposure apparatus, exposure method, and device producing method App 20120026475 - Kida; Yoshiki | 2012-02-02 |
Exposure apparatus, exposure method, and device producing method Grant 8,035,799 - Kida October 11, 2 | 2011-10-11 |
NMR probe Grant 7,872,476 - Ikeda , et al. January 18, 2 | 2011-01-18 |
NMR probe Grant 7,714,579 - Suematsu , et al. May 11, 2 | 2010-05-11 |
Exposure Condition Determination Method, Exposure Method, Exposure Apparatus, And Device Manufacturing Method App 20100002206 - Kida; Yoshiki ;   et al. | 2010-01-07 |
Exposure apparatus adjusting method, exposure apparatus, and device fabricating method App 20090279059 - Shirata; Yosuke ;   et al. | 2009-11-12 |
NMR Probe App 20090261829 - Ikeda; Hiroshi ;   et al. | 2009-10-22 |
Exposure method, exposure apparatus, and method for producing device App 20090135382 - Kida; Yoshiki | 2009-05-28 |
NMR Probe App 20080297156 - Suematsu; Hiroto ;   et al. | 2008-12-04 |
Exposure Apparatus, Exposure Method, and Device Producing Method App 20070252960 - Kida; Yoshiki | 2007-11-01 |
Exposure apparatus, surface position adjustment unit, mask, and device manufacturing method Grant 6,900,880 - Kida , et al. May 31, 2 | 2005-05-31 |
Exposure apparatus, surface position adjustment unit, mask, and device manufacturing method App 20040036849 - Kida, Yoshiki ;   et al. | 2004-02-26 |
Local signal-supplying device for NMR spectrometer Grant 6,680,611 - Kida January 20, 2 | 2004-01-20 |
Local signal-supplying device for NMR spectrometer App 20020109502 - Kida, Yoshiki | 2002-08-15 |
Substrate transport apparatus and method App 20020089655 - Kida, Yoshiki ;   et al. | 2002-07-11 |
Method and apparatus for positioning substrate Grant 6,400,445 - Nishi , et al. June 4, 2 | 2002-06-04 |
Exposure apparatus, surface position adjustment unit, mask, and device manufacturing method App 20020003216 - Kida, Yoshiki ;   et al. | 2002-01-10 |
Method for positioning substrate App 20010016293 - Nishi, Kenji ;   et al. | 2001-08-23 |
Method for positioning substrate Grant 6,225,012 - Nishi , et al. May 1, 2 | 2001-05-01 |