Kida; Hanako
Patent Applications and Registrations
Patent applications and USPTO patent grants for Kida; Hanako.The latest application filed is for "method and system for etching silicon oxide and silicon nitride with high selectivity relative to silicon".
- Kida; Hanako - Watertown MA
- Kida, Hanako - Yamanashi JP
| Patent | Date |
|---|---|
| Method and system for etching silicon oxide and silicon nitride with high selectivity relative to silicon App 20070059938 - Kida; Hanako ; et al. | 2007-03-15 |
| Etching method and plasma etching apparatus App 20050103441 - Honda, Masanobu ; et al. | 2005-05-19 |
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