Khuat Duy; Laurent

Patent Applications and Registrations

Patent applications and USPTO patent grants for Khuat Duy; Laurent.The latest application filed is for "level sensor, a method for determining a height map of a substrate, and a lithographic apparatus".

Company Profile

0.9.7

Khuat Duy; Laurent - Eindhoven NL
Khuat Duy; Laurent - Veldhoven NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Level sensor, a method for determining a height map of a substrate using a selected resolution, and a lithographic apparatus Grant 9,488,465 - Khuat Duy , et al. November 8, 2	2016-11-08
Inspection apparatus and method, lithographic apparatus and lithographic processing cell Grant 9,081,302 - Den Boef , et al. July 14, 2	2015-07-14
Level sensor, lithographic apparatus, and substrate surface positioning method Grant 8,675,210 - Den Boef , et al. March 18, 2	2014-03-18
Self-referencing interferometer, alignment system, and lithographic apparatus Grant 8,610,898 - Khuat Duy December 17, 2	2013-12-17
Lithographic apparatus, device manufacturing method, and method of applying a pattern to a substrate Grant 8,570,487 - Khuat Duy , et al. October 29, 2	2013-10-29
Level Sensor, a Method for Determining a Height Map of a Substrate, and a Lithographic Apparatus App 20130128247 - KHUAT DUY; Laurent ; et al.	2013-05-23
Level Sensor, Lithographic Apparatus, And Substrate Surface Positioning Method App 20130077079 - DEN BOEF; Arie Jeffrey ; et al.	2013-03-28
Inspection Apparatus and Method, Lithographic Apparatus and Lithographic Processing Cell App 20120075601 - DEN BOEF; Arie Jeffrey ; et al.	2012-03-29
Self-referencing Interferometer, Alignment System, And Lithographic Apparatus App 20120057171 - KHUAT DUY; Laurent	2012-03-08
Lithographic Apparatus, Device Manufacturing Method, And Method Of Applying A Pattern To A Substrate App 20120058434 - KHUAT DUY; Laurent ; et al.	2012-03-08
Lithographic Apparatus And Device Manufacturing Method App 20100231881 - DEN BOEF; Arie Jeffrey ; et al.	2010-09-16

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