Khodykin; Oleh V.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Khodykin; Oleh V..The latest application filed is for "euv light source components and methods for producing, using and refurbishing same".

Company Profile

0.9.5

Khodykin; Oleh V. - San Diego CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
EUV light source components and methods for producing, using and refurbishing same Grant 8,686,370 - Bowering , et al. April 1, 2	2014-04-01
LPP EUV light source drive laser system Grant 8,461,560 - Ershov , et al. June 11, 2	2013-06-11
EUV Light Source Components and Methods for Producing, Using and Refurbishing Same App 20130070332 - Bowering; Norbert R. ; et al.	2013-03-21
EUV light source components and methods for producing, using and refurbishing same Grant 8,314,398 - Bowering , et al. November 20, 2	2012-11-20
Euv Light Source Components And Methods For Producing, Using And Refurbishing Same App 20110192985 - Bowering; Norbert R. ; et al.	2011-08-11
EUV light source components and methods for producing, using and refurbishing same Grant 7,960,701 - Bowering , et al. June 14, 2	2011-06-14
LPP EUV light source drive laser system Grant 7,928,417 - Ershov , et al. April 19, 2	2011-04-19
Systems and methods for target material delivery in a laser produced plasma EUV light source Grant 7,872,245 - Vaschenko , et al. January 18, 2	2011-01-18
Systems and methods for target material delivery in a laser produced plasma EUV light source App 20090230326 - Vaschenko; Georgiy O. ; et al.	2009-09-17
LPP EUV plasma source material target delivery system Grant 7,589,337 - Bykanov , et al. September 15, 2	2009-09-15
EUV light source components and methods for producing, using and refurbishing same App 20090159808 - Bowering; Norbert R. ; et al.	2009-06-25
Alternative fuels for EUV light source Grant 7,465,946 - Bowering , et al. December 16, 2	2008-12-16
Alternative fuels for EUV light source App 20060249699 - Bowering; Norbert R. ; et al.	2006-11-09

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