Khodykin; Oleh
Patent Applications and Registrations
Patent applications and USPTO patent grants for Khodykin; Oleh.The latest application filed is for "lpp euv light source drive laser system".
- Khodykin; Oleh - San Diego CA
| Patent | Date |
|---|---|
| Laser produced plasma EUV light source Grant 8,035,092 - Bykanov , et al. October 11, 2 | 2011-10-11 |
| LPP EUV Light Source Drive Laser System App 20110192995 - Ershov; Alexander I. ; et al. | 2011-08-11 |
| Extreme ultraviolet light source App 20100176313 - Melnychuk; Stephan T. ; et al. | 2010-07-15 |
| Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source Grant 7,732,793 - Ershov , et al. June 8, 2 | 2010-06-08 |
| Laser produced plasma EUV light source App 20100127186 - Bykanov; Alexander N. ; et al. | 2010-05-27 |
| Laser produced plasma EUV light source Grant 7,671,349 - Bykanov , et al. March 2, 2 | 2010-03-02 |
| Extreme ultraviolet light source Grant 7,642,533 - Partio , et al. January 5, 2 | 2010-01-05 |
| Drive laser delivery systems for euv light source App 20090267005 - Bykanov; Alexander N. ; et al. | 2009-10-29 |
| LPP EUV light source drive laser system App 20090095925 - Ershov; Alexander I. ; et al. | 2009-04-16 |
| Drive laser delivery systems for EUV light source Grant 7,491,954 - Bykanov , et al. February 17, 2 | 2009-02-17 |
| LPP EUV light source drive laser system Grant 7,482,609 - Ershov , et al. January 27, 2 | 2009-01-27 |
| LPP EUV light source drive laser system Grant 7,439,530 - Ershov , et al. October 21, 2 | 2008-10-21 |
| LPP EUV plasma source material target delivery system App 20080179549 - Bykanov; Alexander N. ; et al. | 2008-07-31 |
| Laser produced plasma EUV light source App 20080179548 - Bykanov; Alexander N. ; et al. | 2008-07-31 |
| LPP EUV drive laser input system Grant 7,402,825 - Simmons , et al. July 22, 2 | 2008-07-22 |
| Source material dispenser for EUV light source Grant 7,378,673 - Bykanov , et al. May 27, 2 | 2008-05-27 |
| LPP EUV plasma source material target delivery system Grant 7,372,056 - Bykanov , et al. May 13, 2 | 2008-05-13 |
| Extreme ultraviolet light source Grant 7,368,741 - Melnychuk , et al. May 6, 2 | 2008-05-06 |
| EUV light source collector lifetime improvements Grant 7,365,349 - Partlo , et al. April 29, 2 | 2008-04-29 |
| Drive laser delivery systems for EUV light source App 20080087847 - Bykanov; Alexander N. ; et al. | 2008-04-17 |
| Extreme ultraviolet light source App 20080023657 - Melnychuk; Stephen T. ; et al. | 2008-01-31 |
| Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source App 20070187627 - Ershov; Alexander I. ; et al. | 2007-08-16 |
| Discharge produced plasma EUV light source Grant 7,180,081 - Walker , et al. February 20, 2 | 2007-02-20 |
| EUV light source collector lifetime improvements App 20070023705 - Partlo; William N. ; et al. | 2007-02-01 |
| LPP EUV light source drive laser system App 20070001131 - Ershov; Alexander I. ; et al. | 2007-01-04 |
| LPP EUV plasma source material target delivery system App 20070001130 - Bykanov; Alexander N. ; et al. | 2007-01-04 |
| LPP EUV drive laser input system App 20060289806 - Simmons; Rodney D. ; et al. | 2006-12-28 |
| Laser produced plasma EUV light source with pre-pulse App 20060255298 - Bykanov; Alexander N. ; et al. | 2006-11-16 |
| Systems for protecting internal components of an EUV light source from plasma-generated debris Grant 7,109,503 - Bowering , et al. September 19, 2 | 2006-09-19 |
| Source material dispenser for EUV light source App 20060192153 - Bykanov; Alexander N. ; et al. | 2006-08-31 |
| LPP EUV light source drive laser system App 20060192152 - Ershov; Alexander I. ; et al. | 2006-08-31 |
| Systems For Protecting Internal Components Of An Euv Light Source From Plasma-generated Debris App 20060192151 - Bowering; Norbert R. ; et al. | 2006-08-31 |
| Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source App 20050269529 - Ershov, Alexander I. ; et al. | 2005-12-08 |
| Extreme ultraviolet light source Grant 6,972,421 - Melnychuk , et al. December 6, 2 | 2005-12-06 |
| Extreme ultraviolet light source App 20050230645 - Melnychuk, Stephan T. ; et al. | 2005-10-20 |
| Plasma focus light source with improved pulse power system Grant 6,815,700 - Melnychuk , et al. November 9, 2 | 2004-11-09 |
| Extreme ultraviolet light source App 20040108473 - Melnychuk, Stephan T. ; et al. | 2004-06-10 |
| Plasma focus light source with improved pulse power system App 20030006383 - Melnychuk, Stephan T. ; et al. | 2003-01-09 |
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