| Patent | Date |
|---|
Ex Situ Coating Of Chamber Components For Semiconductor Processing
App 20220275504 - SHANBHAG; Damodar Rajaram ; et al. | 2022-09-01 |
Ex situ coating of chamber components for semiconductor processing
Grant 11,365,479 - Shanbhag , et al. June 21, 2 | 2022-06-21 |
Edge Exclusion Control
App 20210375591 - Chandrashekar; Anand ; et al. | 2021-12-02 |
Ex Situ Coating Of Chamber Components For Semiconductor Processing
App 20200347497 - Shanbhag; Damodar ; et al. | 2020-11-05 |
Ex situ coating of chamber components for semiconductor processing
Grant 10,760,158 - Shanbhag , et al. Sep | 2020-09-01 |
Ex Situ Coating Of Chamber Components For Semiconductor Processing
App 20190185999 - Shanbhag; Damodar ; et al. | 2019-06-20 |
Apparatus And Method For Providing Fluid For Immersion Lithography
App 20190137888 - POON; Alex Ka Tim ; et al. | 2019-05-09 |
Apparatus and method for providing fluid for immersion lithography
Grant 10,203,610 - Poon , et al. Feb | 2019-02-12 |
Apparatus And Method For Providing Fluid For Immersion Lithography
App 20180039187 - POON; Alex Ka Tim ; et al. | 2018-02-08 |
Apparatus and method for providing fluid for immersion lithography
Grant 9,817,319 - Poon , et al. November 14, 2 | 2017-11-14 |
Apparatus And Method For Providing Fluid For Immersion Lithography
App 20170108784 - POON; Alex Ka Tim ; et al. | 2017-04-20 |
Apparatus and method for providing fluid for immersion lithography
Grant 9,547,243 - Poon , et al. January 17, 2 | 2017-01-17 |
Apparatus and method to control vacuum at porous material using multiple porous materials
Grant 9,329,492 - Poon , et al. May 3, 2 | 2016-05-03 |
Apparatus and method for providing fluid for immersion lithography
Grant 9,285,683 - Poon , et al. March 15, 2 | 2016-03-15 |
Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine
Grant 9,217,933 - Poon , et al. December 22, 2 | 2015-12-22 |
Immersion lithography apparatus and method having movable liquid diverter between immersion liquid confinement member and substrate
Grant 9,176,394 - Poon , et al. November 3, 2 | 2015-11-03 |
Apparatus And Method For Providing Fluid For Immersion Lithography
App 20150036113 - POON; Alex Ka Tim ; et al. | 2015-02-05 |
Apparatus and methods for recovering fluid in immersion lithography
Grant 8,934,080 - Poon , et al. January 13, 2 | 2015-01-13 |
Apparatus and method for providing fluid for immersion lithography
Grant 8,896,807 - Poon , et al. November 25, 2 | 2014-11-25 |
Apparatus And Methods For Keeping Immersion Fluid Adjacent To An Optical Assembly During Wafer Exchange In An Immersion Lithography Machine
App 20140232999 - POON; Alex Ka Tim ; et al. | 2014-08-21 |
Apparatus and method for recovering liquid droplets in immersion lithography
Grant 8,780,323 - Poon , et al. July 15, 2 | 2014-07-15 |
Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine
Grant 8,743,343 - Poon , et al. June 3, 2 | 2014-06-03 |
Immersion Lithography Apparatus And Method Having Movable Liquid Diverter Between Immersion Liquid Confinement Member And Substrate
App 20140071412 - POON; Alex Ka Tim ; et al. | 2014-03-13 |
Apparatus and method to control vacuum at porous material using multiple porous materials
Grant 8,634,055 - Poon , et al. January 21, 2 | 2014-01-21 |
Immersion lithography apparatus and method having movable liquid diverter between immersion liquid confinement member and substrate
Grant 8,610,873 - Poon , et al. December 17, 2 | 2013-12-17 |
Apparatus And Method For Providing Fluid For Immersion Lithography
App 20130301015 - POON; Alex Ka Tim ; et al. | 2013-11-14 |
Apparatus And Method To Control Vacuum At Porous Material Using Multiple Porous Materials
App 20130286366 - POON; Alex Ka Tim ; et al. | 2013-10-31 |
Apparatus and method for providing fluid for immersion lithography
Grant 8,520,187 - Poon , et al. August 27, 2 | 2013-08-27 |
Apparatus and method to control vacuum at porous material using multiple porous materials
Grant 8,477,284 - Poon , et al. July 2, 2 | 2013-07-02 |
Apparatus And Methods For Keeping Immersion Fluid Adjacent To An Optical Assembly During Wafer Exchange In An Immersion Lithography Machine
App 20130141702 - POON; Alex Ka Tim ; et al. | 2013-06-06 |
Apparatus And Methods For Recovering Fluid In Immersion Lithography
App 20130010271 - POON; Alex Ka Tim ; et al. | 2013-01-10 |
Apparatus And Methods For Keeping Immersion Fluid Adjacent To An Optical Assembly During Wafer Exchange In An Immersion Lithography Machine
App 20120262687 - Poon; Alex Ka Tim ; et al. | 2012-10-18 |
Apparatus and methods for recovering fluid in immersion lithography
Grant 8,289,497 - Poon , et al. October 16, 2 | 2012-10-16 |
Apparatus And Methods To Recover Liquid In Immersion Lithography
App 20120257179 - COON; Derek ; et al. | 2012-10-11 |
Microchannel-cooled Coils Of Electromagnetic Actuators Exhibiting Reduced Eddy-current Drag
App 20120062866 - Binnard; Michael B. ; et al. | 2012-03-15 |
Apparatus and method for providing fluid for immersion lithography
App 20120013861 - Poon; Alex Ka Tim ; et al. | 2012-01-19 |
Nozzle to help reduce the escape of immersion liquid from an immersion lithography tool
Grant 8,068,209 - Poon , et al. November 29, 2 | 2011-11-29 |
Apparatus and method for providing fluid for immersion lithography
Grant 8,054,448 - Poon , et al. November 8, 2 | 2011-11-08 |
Apparatus and method for recovering liquid droplets in immersion lithography
App 20110164239 - Poon; Alex Ka Tim ; et al. | 2011-07-07 |
Apparatus and method for recovering liquid droplets in immersion lithography
Grant 7,929,109 - Poon , et al. April 19, 2 | 2011-04-19 |
Electromagnetic Coil Design for Improved Thermal Performance
App 20100271159 - Poon; Alex Ka Tim ; et al. | 2010-10-28 |
Apparatus and method for recovering fluid for immersion lithography
App 20100231876 - Poon; Alex Ka Tim ; et al. | 2010-09-16 |
Apparatus And Method To Control Liquid Stagnation In Immersion Liquid Recovery
App 20100220301 - POON; Alex Ka Tim ; et al. | 2010-09-02 |
Reticle Error Reduction By Cooling
App 20100186942 - Phillips; Alton H. ; et al. | 2010-07-29 |
Apparatus and method for recovering fluid for immersion lithography
Grant 7,751,026 - Poon , et al. July 6, 2 | 2010-07-06 |
Apparatus And Method To Control Vacuum At Porous Material Using Multiple Porous Materials
App 20100134773 - POON; Alex Ka Tim ; et al. | 2010-06-03 |
Apparatus And Method To Control Vacuum At Porous Material Using Multiple Porous Materials
App 20100097585 - POON; Alex Ka Tim ; et al. | 2010-04-22 |
Apparatus and method for providing fluid for immersion lithography
App 20090296053 - Poon; Alex Ka Tim ; et al. | 2009-12-03 |
Apparatus and methods for recovering fluid in immersion lithography
App 20090237631 - Poon; Alex Ka Tim ; et al. | 2009-09-24 |
Immersion lithography apparatus and method having movable liquid diverter between immersion liquid confinement member and substrate
App 20090231560 - Poon; Alex Ka Tim ; et al. | 2009-09-17 |
Gas curtain type immersion lithography tool using porous material for fluid removal
Grant 7,576,833 - Poon , et al. August 18, 2 | 2009-08-18 |
Immersion lithography system and method having an immersion fluid containment plate for submerging the substrate to be imaged in immersion fluid
Grant 7,532,309 - Poon , et al. May 12, 2 | 2009-05-12 |
Gas curtain type immersion lithography tool using porous material for fluid removal
App 20090002648 - Poon; Alex Ka Tim ; et al. | 2009-01-01 |
Nozzle to help reduce the escape of immersion liquid from an immersion lithography tool
App 20080231822 - Poon; Alex Ka Tim ; et al. | 2008-09-25 |
Apparatus and methods for reducing the escape of immersion liquid from immersion lithography apparatus
App 20080231823 - Poon; Alex Ka Tim ; et al. | 2008-09-25 |
Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine
App 20080225246 - Poon; Alex Ka Tim ; et al. | 2008-09-18 |
Apparatus, systems and methods for removing liquid from workpiece during workpiece processing
App 20080225248 - Poon; Alex Ka Tim ; et al. | 2008-09-18 |
Apparatus and methods for removing immersion liquid from substrates using temperature gradient
App 20080212050 - Poon; Alex Ka Tim ; et al. | 2008-09-04 |
Apparatus and methods for minimizing force variation from immersion liquid in lithography systems
App 20080198348 - Poon; Alex Ka Tim ; et al. | 2008-08-21 |
Non-contact pneumatic transfer for stages with small motion
Grant 7,375,800 - Poon , et al. May 20, 2 | 2008-05-20 |
Immersion lithography system and method having a wafer chuck made of a porous material
App 20080100812 - Poon; Alex Ka Tim ; et al. | 2008-05-01 |
Exposure apparatus that includes a phase change circulation system for movers
App 20080073563 - Novak; W. Thomas ; et al. | 2008-03-27 |
Apparatus and methods for recovering fluid in immersion lithography
App 20080043211 - Poon; Alex Ka Tim ; et al. | 2008-02-21 |
Stage assembly with secure device holder
App 20070292245 - Phillips; Alton H. ; et al. | 2007-12-20 |
Immersion lithography system and method having an immersion fluid containment plate for submerging the substrate to be imaged in immersion fluid
App 20070279608 - Poon; Alex Ka Tim ; et al. | 2007-12-06 |
Apparatus and method for providing fluid for immersion lithography
Grant 7,292,313 - Poon , et al. November 6, 2 | 2007-11-06 |
System and method for measuring displacement of a stage
Grant 7,283,200 - Poon , et al. October 16, 2 | 2007-10-16 |
Apparatus and Method for Providing Fluid for Immersion Lithography
App 20070222967 - Poon; Alex Ka Tim ; et al. | 2007-09-27 |
Apparatus and method for providing fluid for immersion lithography
App 20070195303 - Poon; Alex Ka Tim ; et al. | 2007-08-23 |
Force provider with adjustable force characteristics for a stage assembly
App 20070131879 - Poon; Alex Ka Tim ; et al. | 2007-06-14 |
Apparatus and method for containing immersion liquid in immersion lithography
App 20070126999 - Poon; Alex Ka Tim ; et al. | 2007-06-07 |
Apparatus and method for recovering liquid droplets in immersion lithography
App 20070091289 - Poon; Alex Ka Tim ; et al. | 2007-04-26 |
Apparatus and method for recovering fluid for immersion lithography
App 20070046910 - Poon; Alex Ka Tim ; et al. | 2007-03-01 |
Apparatus and method for providing fluid for immersion lithography
App 20060152697 - Poon; Alex Ka Tim ; et al. | 2006-07-13 |
Non-contact pneumatic transfer for stages with small motion
App 20060050262 - Poon; Alex Ka Tim ; et al. | 2006-03-09 |
Force provider for a mover assembly of a stage assembly
App 20050169784 - Poon, Alex Ka Tim ; et al. | 2005-08-04 |
Offset gap control for electromagnetic devices
App 20050162802 - Kho, Leonard Wai Fung ; et al. | 2005-07-28 |
Modular stage with reaction force cancellation
Grant 6,917,412 - Poon , et al. July 12, 2 | 2005-07-12 |
Stage with isolated actuators for low vacuum environment
App 20050093502 - Poon, Alex Ka Tim ; et al. | 2005-05-05 |
System and method for measuring displacement of a stage
App 20050012918 - Poon, Alex Ka Tim ; et al. | 2005-01-20 |
Modular Stage With Reaction Force Cancellation
App 20040165172 - Poon, Alex Ka Tim ; et al. | 2004-08-26 |
Double isolation fine stage
App 20040119964 - Poon, Alex Ka Tim ; et al. | 2004-06-24 |
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