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Patent applications and USPTO patent grants for Kho; Jeffrey A..The latest application filed is for "methods and apparatus for ald processes".
Patent | Date |
---|---|
Methods and apparatus for ALD processes Grant 11,306,393 - Kho , et al. April 19, 2 | 2022-04-19 |
Gas flow guide design for uniform flow distribution and efficient purge Grant 10,697,062 - Kao , et al. | 2020-06-30 |
Methods And Apparatus For Ald Processes App 20200040455 - KHO; Jeffrey A. ;   et al. | 2020-02-06 |
Gas Flow Guide Design For Uniform Flow Distribution And Efficient Purge App 20200017971 - KAO; Chien-Teh ;   et al. | 2020-01-16 |
Methods and apparatus to reduce shock in a slit valve door Grant 9,752,703 - Kho September 5, 2 | 2017-09-05 |
Ground Return For Plasma Processes App 20160305025 - CHOI; Soo Young ;   et al. | 2016-10-20 |
Ground return for plasma processes Grant 9,382,621 - Choi , et al. July 5, 2 | 2016-07-05 |
Methods And Apparatus To Reduce Shock In A Slit Valve Door App 20150345660 - Kho; Jeffrey A. | 2015-12-03 |
Shockless Slit Valve Control App 20120247564 - KHO; JEFFREY A. | 2012-10-04 |
Shadow frame support Grant D627,625 - Anwar , et al. November 23, 2 | 2010-11-23 |
Ground Return For Plasma Processes App 20100196626 - Choi; Soo Young ;   et al. | 2010-08-05 |
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