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Stabilization of high-k dielectric materials Grant 8,323,754 - Olsen , et al. December 4, 2 | 2012-12-04 |
Method of forming an aluminum oxide layer Grant 8,163,343 - Kher , et al. April 24, 2 | 2012-04-24 |
Surface pre-treatment for enhancement of nucleation of high dielectric constant materials Grant 8,071,167 - Kher , et al. December 6, 2 | 2011-12-06 |
Atomic layer deposition processes for non-volatile memory devices Grant 8,043,907 - Ma , et al. October 25, 2 | 2011-10-25 |
Methods for manufacturing high dielectric constant film Grant 7,871,942 - Kher , et al. January 18, 2 | 2011-01-18 |
Surface Pre-treatment For Enhancement Of Nucleation Of High Dielectric Constant Materials App 20100239758 - Kher; Shreyas S. ;   et al. | 2010-09-23 |
Ampoule for liquid draw and vapor draw with a continuous level sensor Grant 7,775,508 - Choi , et al. August 17, 2 | 2010-08-17 |
Atomic Layer Deposition Processes for Non-Volatile Memory Devices App 20100102376 - Ma; Yi ;   et al. | 2010-04-29 |
Method Of Forming An Aluminum Oxide Layer App 20100055905 - KHER; SHREYAS S. ;   et al. | 2010-03-04 |
Atomic layer deposition processes for non-volatile memory devices Grant 7,659,158 - Ma , et al. February 9, 2 | 2010-02-09 |
Atomic Layer Deposition Processes For Non-volatile Memory Devices App 20090242957 - Ma; Yi ;   et al. | 2009-10-01 |
Methods For Manufacturing High Dielectric Constant Film App 20090246972 - KHER; SHREYAS S. ;   et al. | 2009-10-01 |
ALD metal oxide deposition process using direct oxidation Grant 7,569,500 - Metzner , et al. August 4, 2 | 2009-08-04 |
ALD metal oxide deposition process using direct oxidation Grant 7,569,501 - Metzner , et al. August 4, 2 | 2009-08-04 |
System and method for forming a gate dielectric Grant 7,531,468 - Metzner , et al. May 12, 2 | 2009-05-12 |
Ampoule For Liquid Draw And Vapor Draw With A Continous Level Sensor App 20080099933 - Choi; Kenric T. ;   et al. | 2008-05-01 |
Precursors And Hardware For Cvd And Ald App 20080063798 - Kher; Shreyas S. ;   et al. | 2008-03-13 |
System And Method For Forming A Gate Dielectric App 20080057737 - METZNER; CRAIG R. ;   et al. | 2008-03-06 |
System and method for forming a gate dielectric Grant 7,304,004 - Metzner , et al. December 4, 2 | 2007-12-04 |
Ald Metal Oxide Deposition Process Using Direct Oxidation App 20070059948 - Metzner; Craig R. ;   et al. | 2007-03-15 |
Nitrogen profile engineering in HI-K nitridation for device performance enhancement and reliability improvement App 20070049043 - Muthukrishnan; Shankar ;   et al. | 2007-03-01 |
Surface Pre-treatment For Enhancement Of Nucleation Of High Dielectric Constant Materials App 20060264067 - Kher; Shreyas S. ;   et al. | 2006-11-23 |
Ald Metal Oxide Deposition Process Using Direct Oxidation App 20060223339 - Metzner; Craig R. ;   et al. | 2006-10-05 |
Method for fabricating a dielectric stack App 20060153995 - Narwankar; Pravin K. ;   et al. | 2006-07-13 |
ALD metal oxide deposition process using direct oxidation Grant 7,067,439 - Metzner , et al. June 27, 2 | 2006-06-27 |
Vapor deposition of hafnium silicate materials with tris(dimethylamino)silane App 20060062917 - Muthukrishnan; Shankar ;   et al. | 2006-03-23 |
Plasma treatment of hafnium-containing materials App 20060019033 - Muthukrishnan; Shankar ;   et al. | 2006-01-26 |
Stabilization of high-k dielectric materials App 20050260357 - Olsen, Christopher ;   et al. | 2005-11-24 |
System and method for forming a gate dielectric Grant 6,858,547 - Metzner , et al. February 22, 2 | 2005-02-22 |
System and method for forming a gate dielectric App 20050009371 - Metzner, Craig R. ;   et al. | 2005-01-13 |
System and method for forming a gate dielectric App 20030232506 - Metzner, Craig R. ;   et al. | 2003-12-18 |
ALD metal oxide deposition process using direct oxidation App 20030232511 - Metzner, Craig R. ;   et al. | 2003-12-18 |
Surface pre-treatment for enhancement of nucleation of high dielectric constant materials App 20030232501 - Kher, Shreyas S. ;   et al. | 2003-12-18 |
Method of synthesizing III-V semiconductor nanocrystals Grant 5,474,591 - Wells , et al. December 12, 1 | 1995-12-12 |