Patent | Date |
---|
Method of matching two or more plasma reactors Grant 9,305,748 - Saraf , et al. April 5, 2 | 2016-04-05 |
Component For Semiconductor Process Chamber Having Surface Treatment To Reduce Particle Emission App 20160056059 - SUN; Jennifer ;   et al. | 2016-02-25 |
Predictive method of matching two plasma reactors Grant 9,184,021 - Saraf , et al. November 10, 2 | 2015-11-10 |
Predictive Method Of Matching Two Plasma Reactors App 20150099314 - Saraf; Gaurav ;   et al. | 2015-04-09 |
Method Of Matching Two Or More Plasma Reactors App 20150096959 - Saraf; Gaurav ;   et al. | 2015-04-09 |
Methods For Forming A Round Bottom Silicon Trench Recess For Semiconductor Applications App 20150031187 - Han; Joo Won ;   et al. | 2015-01-29 |
Methods for forming three dimensional NAND structures atop a substrate Grant 8,937,021 - Cho , et al. January 20, 2 | 2015-01-20 |
Methods for forming a round bottom silicon trench recess for semiconductor applications Grant 8,932,947 - Han , et al. January 13, 2 | 2015-01-13 |
Methods For Forming Three Dimensional Nand Structures Atop A Substrate App 20140377959 - CHO; HAN SOO ;   et al. | 2014-12-25 |
Self Aligned Dual Patterning Technique Enhancement With Magnetic Shielding App 20140212994 - KIM; Hun Sang ;   et al. | 2014-07-31 |
Multi-film stack etching with polymer passivation of an overlying etched layer Grant 8,747,684 - Srinivasan , et al. June 10, 2 | 2014-06-10 |
Substrate support temperature control Grant 8,596,336 - Fovell , et al. December 3, 2 | 2013-12-03 |
Methods For Etching Substrates Using Pulsed Dc Voltage App 20120088371 - RANJAN; ALOK ;   et al. | 2012-04-12 |
Multi-film Stack Etching With Polymer Passivation Of An Overlying Etched Layer App 20110045672 - Srinivasan; Sunil ;   et al. | 2011-02-24 |
Fast Substrate Support Temperature Control App 20090294101 - FOVELL; RICHARD ;   et al. | 2009-12-03 |
Etching And Passivating For High Aspect Ratio Features App 20080286978 - Chen; Rong ;   et al. | 2008-11-20 |
Encapsulation of post-etch halogenic residue App 20060032833 - Kawaguchi; Mark Naoshi ;   et al. | 2006-02-16 |
Method of releasing devices from a substrate Grant 6,905,616 - Kumar , et al. June 14, 2 | 2005-06-14 |
Method for etching high-aspect-ratio features Grant 6,897,155 - Kumar , et al. May 24, 2 | 2005-05-24 |
Method of releasing devices from a substrate App 20040173575 - Kumar, Ajay ;   et al. | 2004-09-09 |
Method of etching a trench in a silicon-on-insulator (SOI) structure Grant 6,759,340 - Nallan , et al. July 6, 2 | 2004-07-06 |
Method for laterally etching a semiconductor structure App 20040077178 - Yang, Chan-Syun ;   et al. | 2004-04-22 |
Method for etching high-aspect-ratio features App 20040033697 - Kumar, Ajay ;   et al. | 2004-02-19 |
Method of forming a capacitor using a high K dielectric material App 20030222296 - Kumar, Ajay ;   et al. | 2003-12-04 |
Method of etching a trench in a silicon-on-insulator (SOI) structure App 20030211753 - Nallan, Padmapani C. ;   et al. | 2003-11-13 |