loadpatents
Patent applications and USPTO patent grants for Khan; Adib.The latest application filed is for "gas abatement apparatus".
Patent | Date |
---|---|
Batch curing chamber with gas distribution and individual pumping Grant 11,408,075 - Khan , et al. August 9, 2 | 2022-08-09 |
Gas abatement apparatus Grant 11,110,383 - Khan , et al. September 7, 2 | 2021-09-07 |
Chemical delivery chamber for self-assembled monolayer processes Grant 11,066,747 - Liang , et al. July 20, 2 | 2021-07-20 |
Low vapor pressure chemical delivery Grant 10,947,621 - Khan , et al. March 16, 2 | 2021-03-16 |
Gas Abatement Apparatus App 20200368666 - KHAN; Adib ;   et al. | 2020-11-26 |
Gas Delivery System For High Pressure Processing Chamber App 20200350183 - LIANG; Qiwei ;   et al. | 2020-11-05 |
Gas delivery system for high pressure processing chamber Grant 10,720,341 - Liang , et al. | 2020-07-21 |
In-situ CVD and ALD coating of chamber to control metal contamination Grant 10,704,141 - Malik , et al. | 2020-07-07 |
Gas abatement apparatus Grant 10,675,581 - Khan , et al. | 2020-06-09 |
Gas Abatement Apparatus App 20200038797 - KHAN; Adib ;   et al. | 2020-02-06 |
Flow control features of CVD chambers Grant 10,550,472 - Chuc , et al. Fe | 2020-02-04 |
Processing Apparatus App 20200035513 - KHAN; Adib ;   et al. | 2020-01-30 |
In-situ Cvd And Ald Coating Of Chamber To Control Metal Contamination App 20190368035 - MALIK; Sultan ;   et al. | 2019-12-05 |
Integrated Cluster Tool For Selective Area Deposition App 20190301009 - KAUFMAN-OSBORN; Tobin ;   et al. | 2019-10-03 |
Integrated cluster tool for selective area deposition Grant 10,358,715 - Kaufman-Osborn , et al. | 2019-07-23 |
Gas Delivery System For High Pressure Processing Chamber App 20190148178 - LIANG; Qiwei ;   et al. | 2019-05-16 |
Low Vapor Pressure Chemical Delivery App 20190119813 - KHAN; Adib ;   et al. | 2019-04-25 |
Gas Delivery System For High Pressure Processing Chamber App 20190119769 - KHAN; Adib ;   et al. | 2019-04-25 |
High pressure wafer processing systems and related methods Grant 10,224,224 - Liang , et al. | 2019-03-05 |
Batch Curing Chamber With Gas Distribution And Individual Pumping App 20190048470 - KHAN; Adib ;   et al. | 2019-02-14 |
Batch curing chamber with gas distribution and individual pumping Grant 10,113,236 - Khan , et al. October 30, 2 | 2018-10-30 |
High Pressure Wafer Processing Systems And Related Methods App 20180261480 - LIANG; Qiwei ;   et al. | 2018-09-13 |
Integrated Cluster Tool For Selective Area Deposition App 20170350004 - KAUFMAN-OSBORN; Tobin ;   et al. | 2017-12-07 |
Chemical Delivery Chamber For Self-assembled Monolayer Processes App 20170306491 - LIANG; Qiwei ;   et al. | 2017-10-26 |
Module for ozone cure and post-cure moisture treatment Grant 9,285,168 - Lubomirsky , et al. March 15, 2 | 2016-03-15 |
Batch Curing Chamber With Gas Distribution And Individual Pumping App 20150329970 - KHAN; Adib ;   et al. | 2015-11-19 |
Flow Control Features Of Cvd Chambers App 20150013793 - CHUC; Kien N. ;   et al. | 2015-01-15 |
Flow control features of CVD chambers Grant 8,894,767 - Chuc , et al. November 25, 2 | 2014-11-25 |
Loadlock batch ozone cure Grant 8,524,004 - Lubomirsky , et al. September 3, 2 | 2013-09-03 |
Loadlock Batch Ozone Cure App 20120145079 - Lubomirsky; Dmitry ;   et al. | 2012-06-14 |
Module For Ozone Cure And Post-cure Moisture Treatment App 20120079982 - Lubomirsky; Dmitry ;   et al. | 2012-04-05 |
Flow Control Features Of Cvd Chambers App 20110011338 - Chuc; Kien N. ;   et al. | 2011-01-20 |
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