| Patent | Date |
|---|
Low resistance fill metal layer material as stressor in metal gates
Grant 11,404,416 - Khaderbad , et al. August 2, 2 | 2022-08-02 |
Contact and via structures for semiconductor devices
Grant 11,380,781 - Khaderbad , et al. July 5, 2 | 2022-07-05 |
Contact interface engineering for reducing contact resistance
Grant 11,362,212 - Khaderbad , et al. June 14, 2 | 2022-06-14 |
Method And Structure For Barrier-less Plug
App 20220108919 - Wang; Sung-Li ; et al. | 2022-04-07 |
Semiconductor device having gate dielectric and inhibitor film over gate dielectric
Grant 11,211,465 - Khaderbad , et al. December 28, 2 | 2021-12-28 |
Semiconductor structure with metal containing layer
Grant 11,201,232 - Khaderbad , et al. December 14, 2 | 2021-12-14 |
Method and structure for barrier-less plug
Grant 11,158,539 - Wang , et al. October 26, 2 | 2021-10-26 |
Semiconductor Structure With Material Modification And Low Resistance Plug
App 20210280459 - Khaderbad; Mrunal A. ; et al. | 2021-09-09 |
Partial Barrier Free Vias for Cobalt-Based Interconnects and Methods of Fabrication Thereof
App 20210257302 - Tsai; Tsung-Ling ; et al. | 2021-08-19 |
Selective Dual Silicide Formation Using A Maskless Fabrication Process Flow
App 20210257262 - Khaderbad; Mrunal A. ; et al. | 2021-08-19 |
Contact And Via Structures For Semiconductor Devices
App 20210184018 - KHADERBAD; Mrunal A. ; et al. | 2021-06-17 |
Low Resistance Fill Metal Layer Material as Stressor in Metal Gates
App 20210183858 - Khaderbad; Mrunal A ; et al. | 2021-06-17 |
Semiconductor structure with material modification and low resistance plug
Grant 11,018,053 - Khaderbad , et al. May 25, 2 | 2021-05-25 |
Partial barrier free vias for cobalt-based interconnects and methods of fabrication thereof
Grant 11,004,794 - Tsai , et al. May 11, 2 | 2021-05-11 |
Selective dual silicide formation using a maskless fabrication process flow
Grant 10,998,241 - Khaderbad , et al. May 4, 2 | 2021-05-04 |
Contact Plugs For Semiconductor Device And Method Of Forming Same
App 20210104431 - Khaderbad; Mrunal A. ; et al. | 2021-04-08 |
Method and Structure for Barrier-Less Plug
App 20210098295 - Wang; Sung-Li ; et al. | 2021-04-01 |
Semiconductor Device And Fabrication Thereof
App 20210091182 - WANG; Sung-Li ; et al. | 2021-03-25 |
Contact Interface Engineering for Reducing Contact Resistance
App 20210083119 - Khaderbad; Mrunal A. ; et al. | 2021-03-18 |
Semiconductor device with source/drain contact formed using bottom-up deposition
Grant 10,854,716 - Wang , et al. December 1, 2 | 2020-12-01 |
Method of forming contact plugs for semiconductor device
Grant 10,847,413 - Khaderbad , et al. November 24, 2 | 2020-11-24 |
Semiconductor Structure With Metal Containing Layer
App 20200350421 - KHADERBAD; Mrunal A. ; et al. | 2020-11-05 |
Method for manufacturing semiconductor structure using selective forming process
Grant 10,797,161 - Khaderbad , et al. October 6, 2 | 2020-10-06 |
Conductive Structure Formed By Cyclic Chemical Vapor Deposition
App 20200273695 - KHADERBAD; Mrunal A. ; et al. | 2020-08-27 |
Semiconductor Device And Methods Of Forming The Same
App 20200273794 - Khaderbad; Mrunal A. ; et al. | 2020-08-27 |
Semiconductor Device With Sidewall Passivation And Method Of Making
App 20200119153 - KHADERBAD; Mrunal A. ; et al. | 2020-04-16 |
Selective Dual Silicide Formation Using A Maskless Fabrication Process Flow
App 20200091011 - Khaderbad; Mrunal A. ; et al. | 2020-03-19 |
Method For Manufacturing Semiconductor Structure Using Selective Forming Process
App 20200058769 - KHADERBAD; Mrunal A. ; et al. | 2020-02-20 |
Semiconductor Device And Fabrication Thereof
App 20200035787 - WANG; Sung-Li ; et al. | 2020-01-30 |
Partial Barrier Free Vias for Cobalt-Based Interconnects and Methods of Fabrication Thereof
App 20200006230 - Tsai; Tsung-Ling ; et al. | 2020-01-02 |
Semiconductor Structure with Material Modification and Low Resistance Plug
App 20200006127 - Khaderbad; Mrunal A. ; et al. | 2020-01-02 |
Semiconductor device, interconnection structure and method for forming the same
Grant 10,515,849 - Khaderbad , et al. Dec | 2019-12-24 |
Semiconductor device having gate body and inhibitor film between conductive prelayer over gate body and conductive layer over inhibitor film
Grant 10,510,854 - Khaderbad , et al. Dec | 2019-12-17 |
Semiconductor Device, Interconnection Structure And Method For Forming The Same
App 20190164828 - KHADERBAD; Mrunal A. ; et al. | 2019-05-30 |
Contact Plugs for Semiconductor Device and Method of Forming Same
App 20190164817 - Khaderbad; Mrunal A ; et al. | 2019-05-30 |
Fin field effect transistor (FinFET)
Grant 10,256,311 - Tsau , et al. | 2019-04-09 |
Semiconductor Device And Sidewall Passivation And Method Of Making
App 20180308944 - KHADERBAD; Mrunal A. ; et al. | 2018-10-25 |
Semiconductor device with sidewall passivation and method of making
Grant 10,014,382 - Khaderbad , et al. July 3, 2 | 2018-07-03 |
Fin Field Effect Transistor (FinFET)
App 20160155811 - TSAU; HSUEH-WEN ; et al. | 2016-06-02 |
Semiconductor device fabrication method and structure
Grant 9,349,726 - Lee , et al. May 24, 2 | 2016-05-24 |
Method of forming trench on FinFET and FinFET thereof
Grant 9,287,372 - Tsau , et al. March 15, 2 | 2016-03-15 |
Semiconductor Device Fabrication Method and Structure
App 20150279837 - Lee; Chia-Ching ; et al. | 2015-10-01 |
Method Of Forming Trench On Finfet And Finfet Thereof
App 20150187890 - TSAU; HSUEH-WEN ; et al. | 2015-07-02 |
| 