Keswick; Peter R.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Keswick; Peter R..The latest application filed is for "processes used in an inductively coupled plasma reactor".

Company Profile

0.10.1

Keswick; Peter R. - Newark CA
Keswick; Peter R. - Bloomington MN
Keswick; Peter R. - Fremont CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Plasma reactor using inductive RF coupling, and processes Grant 6,545,420 - Collins , et al. April 8, 2	2003-04-08
Plasma reactor using inductive RF coupling, and processes Grant 6,518,195 - Collins , et al. February 11, 2	2003-02-11
Magnetic confinement in a plasma reactor having an RF bias electrode Grant 6,488,807 - Collins , et al. December 3, 2	2002-12-03
Method for processing substrates using gaseous silicon scavenger Grant 6,444,137 - Collins , et al. September 3, 2	2002-09-03
High temperature silicon surface providing high selectivity in an oxide etch process Grant 6,399,514 - Marks , et al. June 4, 2	2002-06-04
Processes Used In An Inductively Coupled Plasma Reactor App 20020004309 - COLLINS, KENNETH S. ; et al.	2002-01-10
Plasma etch processes Grant 6,251,792 - Collins , et al. June 26, 2	2001-06-26
Process used in an RF coupled plasma reactor Grant 6,068,784 - Collins , et al. May 30, 2	2000-05-30
Plasma reactor and processes using RF inductive coupling and scavenger temperature control Grant 5,888,414 - Collins , et al. March 30, 1	1999-03-30
Silicon scavenger in an inductively coupled RF plasma reactor Grant 5,556,501 - Collins , et al. September 17, 1	1996-09-17
Selectivity for etching an oxide over a nitride Grant 5,423,945 - Marks , et al. June 13, 1	1995-06-13

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