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Patent applications and USPTO patent grants for Keswick; Peter.The latest application filed is for "method of forming borderless contacts".
Patent | Date |
---|---|
Method of forming borderless contacts Grant 7,901,976 - Viswanathan , et al. March 8, 2 | 2011-03-08 |
Gate etch process Grant 7,112,834 - Schwarz , et al. September 26, 2 | 2006-09-26 |
Gate etch process Grant 6,699,795 - Schwarz , et al. March 2, 2 | 2004-03-02 |
Oxide etch process with high selectivity to nitride suitable for use on surfaces of uneven topography Grant 6,194,325 - Yang , et al. February 27, 2 | 2001-02-27 |
Plasma reactor with heated source of a polymer-hardening precursor material Grant 6,036,877 - Collins , et al. March 14, 2 | 2000-03-14 |
Plasma reactor with heated source of a polymer-hardening precursor material Grant 6,024,826 - Collins , et al. February 15, 2 | 2000-02-15 |
Etching titanium nitride using carbon-fluoride and carbon-oxide gas Grant 5,399,237 - Keswick , et al. March 21, 1 | 1995-03-21 |
Reactor chamber self-cleaning process Grant 5,158,644 - Cheung , et al. October 27, 1 | 1992-10-27 |
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